Method and apparatus for removing particles or photoresist on substrates
US-2025285882-A1 · Sep 11, 2025 · US
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Xia Guangyu patents
Xia Guangyu is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Xia Guangyu |
| Total patents | 3 |
| First publication | May 11, 2023 |
| Latest publication | Sep 11, 2025 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Acm Research Shanghai Inc | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P95/00 | 3 |
| H10P72/0426 | 3 |
| H10P72/0411 | 3 |
| H10P72/3302 | 3 |
| H10P72/0462 | 3 |