Systems and methods for pulsed voltage contrast detection and capture of charging dynamics
US-12567558-B2 · Mar 3, 2026 · US
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Wang Yixiang patents
Wang Yixiang is listed as an inventor on 61 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wang Yixiang |
| Total patents | 61 |
| First publication | May 28, 2015 |
| Latest publication | Mar 3, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Object table comprising an electrostatic clamp
US-12525900-B2 · Jan 13, 2026 · US
Method, apparatus, and system for dynamically controlling an electrostatic chuck during an inspection of wafer
US-2026011596-A1 · Jan 8, 2026 · US
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
US-12494342-B2 · Dec 9, 2025 · US
Leveling sensor in multiple charged-particle beam inspection
US-12451324-B2 · Oct 21, 2025 · US
Multi-source illumination unit and method of operating the same
US-12392732-B2 · Aug 19, 2025 · US
Method, apparatus, and system for dynamically controlling an electrostatic chuck during an inspection of wafer
US-12368067-B2 · Jul 22, 2025 · US
Beam manipulation of advanced charge controller module in a charged particle system
US-12217927-B2 · Feb 4, 2025 · US
Self-differential confocal tilt sensor for measuring level variation in charged particle beam system
US-2025037966-A1 · Jan 30, 2025 · US
Object table comprising an electrostatic clamp
US-2024396476-A1 · Nov 28, 2024 · US
Recent patents
Latest publications not already listed above.
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
US-2024379325-A1 · Nov 14, 2024 · US
System for inspecting and grounding a mask in a charged particle system
US-12142451-B2 · Nov 12, 2024 · US
Self-differential confocal tilt sensor for measuring level variation in charged particle beam system
US-12142456-B2 · Nov 12, 2024 · US
Inspection apparatus and method
US-2024369356-A1 · Nov 7, 2024 · US
Thermal-aided inspection by advanced charge controller module in a charged particle system
US-12125669-B2 · Oct 22, 2024 · US
Image contrast enhancement in sample inspection
US-12087542-B2 · Sep 10, 2024 · US
Inspection apparatus and method
US-12072181-B2 · Aug 27, 2024 · US
Method, apparatus, and system for wafer grounding
US-12051562-B2 · Jul 30, 2024 · US
Object table comprising an electrostatic clamp
US-12028000-B2 · Jul 2, 2024 · US
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
US-11929232-B2 · Mar 12, 2024 · US
Methods of inspecting samples with a beam of charged particles
US-2024044820-A1 · Feb 8, 2024 · US
Thermal-aided inspection by advanced charge controller module in a charged particle system
US-2023395352-A1 · Dec 7, 2023 · US
Methods of inspecting samples with multiple beams of charged particles
US-11815473-B2 · Nov 14, 2023 · US
Optical objective lens
US-11808930-B2 · Nov 7, 2023 · US
Systems and methods for pulsed voltage contrast detection and capture of charging dynamics
US-2023335374-A1 · Oct 19, 2023 · US
Thermal-aided inspection by advanced charge controller module in a charged particle system
US-11728131-B2 · Aug 15, 2023 · US
Object table comprising an electrostatic clamp
US-2023246568-A1 · Aug 3, 2023 · US
Optical system with compensation lens
US-11682538-B2 · Jun 20, 2023 · US
Method, apparatus, and system for dynamically controlling an electrostatic chuck during an inspection of wafer
US-2023178406-A1 · Jun 8, 2023 · US
Object table comprising an electrostatic clamp
US-11637512-B2 · Apr 25, 2023 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 58 |
| Hermes Microvision Inc | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J2237/2817 | 35 |
| H01J37/28 | 35 |
| H01J37/265 | 24 |
| H01J37/20 | 21 |
| G01N23/2251 | 18 |