Optical objective lens

Patent metadata

Field	Value
Publication number	US-11808930-B2
Application number	US-201816650862-A
Country	US
Kind code	B2
Filing date	Sep 25, 2018
Priority date	Sep 28, 2017
Publication date	Nov 7, 2023
Grant date	Nov 7, 2023

Abstract

An objective lens for forming an image of an object. The objective lens includes, sequentially from an image side to an object side, a first lens group having negative refractive power, and a second lens group having positive refractive power.

First claim

What is claimed is:

1. An optical imaging system used in a charged particle beam inspection comprising:
an illumination module configured to project a first light beam to an object, wherein the illumination module includes a narrow-band light source;
an objective lens configured to receive a second light beam reflected from the object and form an image of the object and configured to be used under vacuum conditions; and
a detection module configured to detect the image of the sample,
wherein the objective lens comprises, sequentially from an image side to an object side:
a first lens group having negative refractive power; and
a second lens group having positive refractive power.

2. The optical imaging system of claim 1 , wherein an effective focus length (EFL) of the first lens group ranges from −51 mm to −35 mm, and an EFL of the second lens group ranges from 26 mm to 30 mm.

3. The optical imaging system of claim 1 , wherein the first lens group comprises a first doublet cemented lens consisting of, sequentially from the image side to the object side, a first lens and a second lens that provide negative refractive power in total,
wherein the first doublet cemented lens has first through third surfaces arranged sequentially from the image side to the object side, and
wherein the first through third surfaces provide negative, positive, and negative refractive powers, respectively.

4. The optical imaging system of claim 1 , wherein the second lens group comprises, sequentially from the image side to the object side, a second doublet cemented lens L 2 , a third doublet cemented lens L 3 , and a singlet lens L 4 .

5. The optical imaging system of claim 4 , wherein the second doublet cemented lens consists of, sequentially from the image side to the object side, a third lens L 21 and a fourth lens L 22 that provide positive refractive power in total,
wherein the second doublet cemented lens L 2 has fourth through sixth surfaces arranged sequentially from the image side to the object side, and
wherein the fourth through sixth surfaces provide positive, negative, and positive refractive powers, respectively.

6. The optical imaging system of claim 5 , wherein an EFL of the second doublet cemented lens ranges from 74 mm to 369 mm.

7. The optical imaging system of claim 4 , wherein the third doublet cemented lens L 3 comprises, sequentially from the image side to the object side, a fifth lens L 31 and a sixth lens L 32 that provide positive refractive power in total,
wherein the third doublet cemented lens L 3 has seventh through ninth surfaces arranged sequentially from the image side to the object side, and
wherein the seventh through ninth surfaces provide positive, negative, and positive refractive powers, respectively.

8. The optical imaging system of claim 7 , wherein an EFL of the third doublet cemented lens ranges from 86 mm to 185 mm.

9. The optical imaging system of claim 4 , wherein the singlet lens L 4 provides positive refractive power,
wherein the singlet lens L 4 has tenth and eleventh surfaces arranged sequentially from the image side to the object side, and
wherein both of the tenth and eleventh surfaces provide positive refractive powers.

10. The optical imaging system of claim 9 , wherein an EFL of the singlet lens ranges from 49 mm to 66 mm.

11. The optical imaging system of claim 1 , wherein a total EFL of the objective lens ranges from 22 mm to 27 mm.

12. The optical imaging system of claim 1 , wherein when the objective lens is used in combination with a tube lens having an EFL of 200 mm, and wherein magnification of the objective lens ranges from 7.4× to 9.1×.

13. The optical imaging system of claim 1 , wherein when the objective lens is used in combination with a tube lens having an EFL of 200 mm, and wherein magnification of the objective lens ranges from 9.0× to 12.1×.

14. The optical imaging system of claim 1 , wherein a parfocal length of the objective lens is about 95 mm.

15. The optical imaging system of claim 1 , wherein the narrow-band light source has a wavelength range from 495 nm to 572 nm.

Assignees

• Asml Netherlands Bv

Inventors

• Zhang Jian
• Kang Zhiwen
• Wang Yixiang

Classifications

• G02B21/02 Primary

  Objectives · CPC title

• G02B9/00

  Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - (G02B15/00 takes precedence) · CPC title

• G02B13/18

  with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration {(G02B13/002 takes precedence)} · CPC title

• G09B9/10

  with simulated flight- or engine-generated force being applied to aircraft occupant (G09B9/28 takes precedence) · CPC title

• H01J37/226

  Optical arrangements for illuminating the object; optical arrangements for collecting light from the object · CPC title