Chemical mechanical polishing composition and method of polishing silicon nitride over silicon dioxide and simultaneously inhibiting damage to silicon dioxide
US-10954411-B2 · Mar 23, 2021 · US
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Tettey Kwadwo E patents
Tettey Kwadwo E is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Tettey Kwadwo E |
| Total patents | 8 |
| First publication | Mar 28, 2019 |
| Latest publication | Mar 23, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Chemical mechanical polishing composition and method of polishing silicon nitride over silicon dioxide and simultaneously inhibiting damage to silicon dioxide
US-2020362198-A1 · Nov 19, 2020 · US
Aqueous compositions of low dishing silica particles for polysilicon polishing
US-10822524-B2 · Nov 3, 2020 · US
Chemical mechanical polishing compositions and methods having enhanced defect inhibition and selectively polishing silicon nitride over silicon dioxide in an acid environment
US-10787592-B1 · Sep 29, 2020 · US
Chemical mechanical polishing compositions and methods for suppressing the removal rate of amorphous silicon
US-10626298-B1 · Apr 21, 2020 · US
Aqueous silica slurry and amine carboxylic acid compositions selective for nitride removal in polishing and methods of using them
US-10584265-B2 · Mar 10, 2020 · US
Aqueous compositions of low dishing silica particles for polysilicon polishing
US-2019185714-A1 · Jun 20, 2019 · US
Aqueous silica slurry and amine carboxylic acid compositions selective for nitride removal in polishing and methods of using them
US-2019092972-A1 · Mar 28, 2019 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Rohm & Haas Elect Materials Cmp Holdings Inc | 8 |
| Rohm And Haas Electronic Mat Cmp Holdings I | 2 |
| Rohm And Haas Electronic Mat Cmp Holdings | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C09G1/02 | 8 |
| C09K3/1409 | 7 |
| C09K3/1463 | 7 |
| B24B37/044 | 6 |
| H10P95/062 | 5 |