Cathode assembly for integration of embedded electrostatic chuck (esc)
US-2026040884-A1 · Feb 5, 2026 · US
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Tatti Arunkumar patents
Tatti Arunkumar is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Tatti Arunkumar |
| Total patents | 10 |
| First publication | Apr 7, 2022 |
| Latest publication | Feb 5, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Cathode assembly for integration of embedded electrostatic chuck (ESC)
US-12463075-B2 · Nov 4, 2025 · US
Methods and apparatus for mask patterning debris removal
US-12437999-B2 · Oct 7, 2025 · US
Cathode assembly for integration of embedded electrostatic chuck (esc)
US-2025273497-A1 · Aug 28, 2025 · US
Embedded electrostatic chuck (esc)
US-2025273498-A1 · Aug 28, 2025 · US
Electrostatic Chuck with High Cooling Efficiency
US-2025054737-A1 · Feb 13, 2025 · US
Methods and apparatus for mask patterning debris removal
US-2024363348-A1 · Oct 31, 2024 · US
Methods and apparatus for mask patterning debris removal
US-12068159-B2 · Aug 20, 2024 · US
Methods and apparatus for mask patterning debris removal
US-2022319847-A1 · Oct 6, 2022 · US
Shadow ring kit for plasma etch wafer singulation process
US-2022108908-A1 · Apr 7, 2022 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 10 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/722 | 5 |
| H10P54/00 | 5 |
| H01L21/6833 | 5 |
| H10P72/0428 | 5 |
| H10P72/7624 | 4 |