Methods for forming self-aligned contacts using spin-on silicon carbide
US-12080599-B2 · Sep 3, 2024 · US
This page is not indexed by search engines while we improve data quality.
Sun Junling patents
Sun Junling is listed as an inventor on 16 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Sun Junling |
| Total patents | 16 |
| First publication | Sep 22, 2016 |
| Latest publication | Sep 3, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Forming contact holes with controlled local critical dimension uniformity
US-11978631-B2 · May 7, 2024 · US
Methods for Forming Self-Aligned Contacts Using Spin-on Silicon Carbide
US-2023044047-A1 · Feb 9, 2023 · US
Systems and methods to control critical dimension (CD) shrink ratio through radio frequency (RF) pulsing
US-11495436-B2 · Nov 8, 2022 · US
Methods for forming self-aligned contacts using spin-on silicon carbide
US-11482454-B2 · Oct 25, 2022 · US
Methods for Forming Self-Aligned Contacts Using Spin-on Silicon Carbide
US-2022262679-A1 · Aug 18, 2022 · US
Forming contact holes with controlled local critical dimension uniformity
US-2022181152-A1 · Jun 9, 2022 · US
Systems and Methods to Control Critical Dimension (CD) Shrink Ratio through Radio Frequency (RF) Pulsing
US-2021343502-A1 · Nov 4, 2021 · US
Method utilizing using post etch pattern encapsulation
US-10950460-B2 · Mar 16, 2021 · US
Rigid naphthalenediimide triangle structures
US-10903496-B2 · Jan 26, 2021 · US
Recent patents
Latest publications not already listed above.
Mechanically interlocked air-stable radicals
US-10867718-B2 · Dec 15, 2020 · US
Method Utilizing Using Post Etch Pattern Encapsulation
US-2020051832-A1 · Feb 13, 2020 · US
Viologen-based rotaxanes
US-10259913-B2 · Apr 16, 2019 · US
Mechanically interlocked air-stable radicals
US-2019016737-A1 · Jan 17, 2019 · US
Viologen-based rotaxanes
US-2017218135-A1 · Aug 3, 2017 · US
Rigid naphthalenediimide triangle structures
US-2016276669-A1 · Sep 22, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 10 |
| Univ Northwestern | 6 |
| King Abdulaziz City For Science And Tech Kacst | 2 |
| King Abdulaziz City For Science And Tech (Kacst) | 2 |
| King Abdulaziz City Sci & Tech | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P50/283 | 10 |
| H01L21/31116 | 8 |
| H10W20/0693 | 4 |
| H10P95/06 | 4 |
| H10W20/075 | 4 |