Apparatus and method of processing substrate
US-12553138-B2 · Feb 17, 2026 · US
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Son Won Sik patents
Son Won Sik is listed as an inventor on 22 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Son Won Sik |
| Total patents | 22 |
| First publication | Mar 2, 2023 |
| Latest publication | Feb 17, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Irradiating module, and substrate treating apparatus including the same
US-12517440-B2 · Jan 6, 2026 · US
Moving assembly for recovery guard and substrate processing apparatus
US-12508633-B2 · Dec 30, 2025 · US
Substrate treating apparatus and substrate treating method
US-12463086-B2 · Nov 4, 2025 · US
Substrate treating apparatus and substrate treating method
US-12431383-B2 · Sep 30, 2025 · US
Substrate treating apparatus and substrate treating method
US-12400903-B2 · Aug 26, 2025 · US
Moving assembly for recovery guard and substrate processing apparatus
US-12337356-B2 · Jun 24, 2025 · US
Apparatus for processing substrate
US-2024222154-A1 · Jul 4, 2024 · US
Apparatus and method for treating substrate
US-2024170304-A1 · May 23, 2024 · US
Apparatus and method of processing substrate
US-2024035166-A1 · Feb 1, 2024 · US
Recent patents
Latest publications not already listed above.
Moving assembly for recovery guard and substrate processing apparatus
US-2023405648-A1 · Dec 21, 2023 · US
Moving assembly for recovery guard and substrate processing apparatus
US-2023405649-A1 · Dec 21, 2023 · US
Apparatus for treating substrate and method for treating a substrate
US-2023211436-A1 · Jul 6, 2023 · US
Substrate treating apparatus and substrate treating method
US-2023207324-A1 · Jun 29, 2023 · US
Apparatus and method for treating substrate
US-2023205077-A1 · Jun 29, 2023 · US
Irradiating module, and substrate treating apparatus including the same
US-2023205100-A1 · Jun 29, 2023 · US
Apparatus for treating substrate and method for treating a substrate
US-2023185206-A1 · Jun 15, 2023 · US
Irradiating module, and apparatus for treating substrate with the same
US-2023152706-A1 · May 18, 2023 · US
Substrate treating apparatus and substrate treating method
US-2023119960-A1 · Apr 20, 2023 · US
Substrate treating apparatus and substrate treating method
US-2023117064-A1 · Apr 20, 2023 · US
Substrate treating apparatus and substrate treating method
US-2023120608-A1 · Apr 20, 2023 · US
Apparatus for treating substrate and method for treating a substrate
US-2023067973-A1 · Mar 2, 2023 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semes Co Ltd | 22 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0414 | 18 |
| H10P72/0436 | 15 |
| H10P72/0424 | 15 |
| H10P72/0404 | 11 |
| H10P72/7608 | 8 |