Hybrid flow metrology for improved chamber matching
US-10760944-B2 · Sep 1, 2020 · US
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Shareef Iqbal patents
Shareef Iqbal is listed as an inventor on 21 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Shareef Iqbal |
| Total patents | 21 |
| First publication | Mar 12, 2015 |
| Latest publication | Sep 1, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Hybrid flow metrology for improved chamber matching
US-2020049547-A1 · Feb 13, 2020 · US
Gas supply delivery arrangement including a gas splitter for tunable gas flow control
US-10431431-B2 · Oct 1, 2019 · US
Configuration independent gas delivery system
US-10128087-B2 · Nov 13, 2018 · US
Methods and apparatus for supplying process gas in a plasma processing system
US-10002747-B2 · Jun 19, 2018 · US
Metrology method for transient gas flow
US-9778083-B2 · Oct 3, 2017 · US
Systems and methods for providing gases to a process chamber
US-9721763-B2 · Aug 1, 2017 · US
Method and apparatus for shaping a gas profile near bevel edge
US-9721782-B2 · Aug 1, 2017 · US
Corrosion sensor retainer assembly apparatus and method for detecting corrosion
US-9704761-B2 · Jul 11, 2017 · US
Monolithic ceramic component of gas delivery system and method of making and use thereof
US-9580360-B2 · Feb 28, 2017 · US
Recent patents
Latest publications not already listed above.
Cluster mass flow devices and multi-line mass flow devices incorporating the same
US-9335768-B2 · May 10, 2016 · US
Gas supply delivery arrangement including a gas splitter for tunable gas flow control
US-2016111258-A1 · Apr 21, 2016 · US
Corrosion sensor retainer assembly apparatus and method for detecting corrosion
US-2016076989-A1 · Mar 17, 2016 · US
System and method for decreasing scrubber exhaust from gas delivery panels
US-9175808-B2 · Nov 3, 2015 · US
Systems and methods for providing gases to a process chamber
US-2015303035-A1 · Oct 22, 2015 · US
Configuration independent gas delivery system
US-2015287573-A1 · Oct 8, 2015 · US
Monolithic ceramic component of gas delivery system and method of making and use thereof
US-2015287572-A1 · Oct 8, 2015 · US
Gas supply systems for substrate processing chambers and methods therefor
US-9090972-B2 · Jul 28, 2015 · US
Shared gas panels in plasma processing chambers employing multi-zone gas feeds
US-9091397-B2 · Jul 28, 2015 · US
Annular baffle for pumping from above a plane of the semiconductor wafer support
US-2015155187-A1 · Jun 4, 2015 · US
Clutter Mass Flow Devices and Multi-Line Mass Flow Devices Incorporating The Same
US-2015068613-A1 · Mar 12, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 21 |
| Shareef Iqbal | 4 |
| Taskar Mark | 3 |
| Spyropoulos Evangelos | 2 |
| Agarwal Piyush | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/45561 | 9 |
| H01J37/3244 | 7 |
| H10P72/0421 | 6 |
| H01J37/32449 | 5 |
| H10P72/0402 | 5 |