Corrosion sensor retainer assembly apparatus and method for detecting corrosion

Patent metadata

Field	Value
Publication number	US-9704761-B2
Application number	US-201414489148-A
Country	US
Kind code	B2
Filing date	Sep 17, 2014
Priority date	Sep 17, 2014
Publication date	Jul 11, 2017
Grant date	Jul 11, 2017

Abstract

A corrosion sensor retainer assembly and method for predicting and detecting corrosion within a gas delivery system of a semiconductor substrate processing apparatus. The corrosion sensor retainer assembly comprises a laminate that includes a first insulating layer with a first port and a second insulating layer with a second port, wherein the first port and the second port are configured to retain a seal. The corrosion sensor retainer assembly includes a conductor housed within the laminate. The conductor forms a path that extends around the first port and the second port. At least a portion of the conductor has an exposed surface with a property that changes in the presence of corrosive gas or acid.

First claim

What is claimed is:

1. A corrosion sensor retainer assembly for predicting and detecting corrosion within a fluid delivery system of a vacuum chamber, the corrosion sensor retainer assembly comprising:
a seal consisting of metallic material;
a laminate comprising at least a first insulating layer, including at least a first port, and at least a second insulating layer, including at least a second port, wherein the first port and the second port are configured to retain the seal;
at least one conductor forming a path that extends around at least part of the first port and the second port, wherein the conductor is housed within the laminate between the first insulating layer and the second insulating layer; and
at least a portion of the path of the conductor having an exposed surface.

2. The corrosion sensor retainer assembly of claim 1 , wherein the conductor forms part of a monitoring circuit and is configured to send a signal in response to the exposed surface of the conductor becoming corroded.

3. The corrosion sensor retainer assembly of claim 1 , wherein the conductor forms part of a monitoring circuit and is configured to send a signal in response to the exposed surface of the conductor becoming disconnected.

4. The corrosion sensor retainer assembly of claim 1 , wherein the first insulating layer or the second insulating layer comprises an aperture which resides over the portion of the conductor having the exposed surface.

5. The corrosion sensor retainer assembly of claim 1 , wherein the portion of the conductor having the exposed surface is located at a distance of two millimeters or less away from an edge of the first port and an edge of the second port.

6. The corrosion sensor retainer assembly of claim 1 , wherein the conductor comprises stainless steel.

7. The corrosion sensor retainer assembly of claim 1 , wherein the first insulating layer and the second insulating layer comprise polyimide.

8. The corrosion sensor retainer assembly of claim 1 , wherein the laminate is configured to interface between an integrated surface mount component and a mixing manifold.

9. The corrosion sensor retainer assembly of claim 1 , wherein a thickness of the laminate is less than or equal to 5 millimeters.

10. A gas block comprising the corrosion sensor retainer assembly of claim 1 , wherein the gas block and the corrosion sensor retainer assembly are configured to permit a gas to flow through the gas block into a semiconductor processing chamber and the corrosion sensor retainer assembly via the first port and the second port.

11. A vacuum chamber comprising a gas block which includes the corrosion sensor retainer assembly of claim 1 , wherein the gas block and the corrosion sensor retainer assembly are configured to permit a gas to flow through the gas block and the corrosion sensor retainer assembly via the first port and the second port.

12. The vacuum chamber of claim 11 , wherein the vacuum chamber is a plasma etching chamber.

13. A method of predicting and detecting corrosion within a fluid delivery system of a vacuum chamber with a corrosion sensor retainer assembly, said method comprising:
passing a fluid through a seal consisting of metallic material, the seal being retained by a corrosion sensor retainer assembly, wherein the corrosion sensor retainer assembly includes a laminate comprising at least a first insulating layer, including at least a first port, and at least a second insulating layer, including at least a second port;
retaining the seal by the first port and the second port;
monitoring a parameter of a circuit that includes at least one conductor forming a path that extends around at least part of the first port and the second port, wherein the conductor is housed within the laminate between the first insulating layer and the second insulating layer, and at least a portion of the path of the conductor having an exposed surface, wherein the parameter is related to a property of the exposed surface;
comparing the parameter to a predetermined value; and
detecting the presence of a leak in the seal based on a result of the comparison.

14. The method of claim 13 , wherein the parameter is based on a voltage, a resistance, or a current of the circuit.

15. The method of claim 13 , wherein the fluid is a corrosive gas or acid, the method further comprising: detecting the presence of a corrosive gas or acid.

16. The method of claim 13 , wherein the parameter is based on the circuit being in a disconnected state.

17. The method of claim 13 , wherein the fluid is a processing gas.

18. The method of claim 17 , wherein the processing gas is a hydrogen containing gas or hydrogen bromide.

19. The method of claim 13 , wherein the vacuum chamber is a plasma etching chamber and the fluid is a halogen-containing gas.

20. The method of claim 13 , wherein the seal is in a gas block supplying processing gas to a plasma etching chamber, in which a single semiconductor substrate is plasma etched.

Assignees

• Lam Res Corp

Inventors

• Taskar Mark
• Shareef Iqbal
• Zemlock Anthony

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P74/20 Primary

  characterised by the properties tested or measured, e.g. structural or electrical properties · CPC title

• H01L21/67017

  Electricity · mapped topic

• H01L22/10 Primary

  Electricity · mapped topic