Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
US-12331402-B2 · Jun 17, 2025 · US
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Schlosser Will patents
Schlosser Will is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Schlosser Will |
| Total patents | 9 |
| First publication | Jun 14, 2018 |
| Latest publication | Jun 17, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
US-2024318312-A1 · Sep 26, 2024 · US
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
US-12000047-B2 · Jun 4, 2024 · US
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
US-2023175134-A1 · Jun 8, 2023 · US
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
US-11608559-B2 · Mar 21, 2023 · US
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
US-2021371982-A1 · Dec 2, 2021 · US
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
US-11101164-B2 · Aug 24, 2021 · US
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
US-10604841-B2 · Mar 31, 2020 · US
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
US-2018163305-A1 · Jun 14, 2018 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 9 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0448 | 9 |
| H10P72/0421 | 9 |
| H10P72/7624 | 9 |
| H10P72/7616 | 9 |
| H10P72/7612 | 9 |