Optics for In-Situ Scanning Electron Microscope Repair
US-2025087450-A1 · Mar 13, 2025 · US
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Plettner Tomas patents
Plettner Tomas is listed as an inventor on 18 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Plettner Tomas |
| Total patents | 18 |
| First publication | Mar 12, 2015 |
| Latest publication | Mar 13, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Multi-beam electronics scan
US-12014895-B2 · Jun 18, 2024 · US
Shielding strategy for mitigation of stray field for permanent magnet array
US-11927549-B2 · Mar 12, 2024 · US
Shaped aperture set for multi-beam array configurations
US-11615939-B2 · Mar 28, 2023 · US
Shielding strategy for mitigation of stray field for permanent magnet array
US-2023076175-A1 · Mar 9, 2023 · US
Shaped aperture set for multi-beam array configurations
US-2022310355-A1 · Sep 29, 2022 · US
Multi-beam electronics scan
US-2022199352-A1 · Jun 23, 2022 · US
Multi-column scanning electron microscopy system
US-2021090844-A1 · Mar 25, 2021 · US
Multi-column scanning electron microscopy system
US-10840056-B2 · Nov 17, 2020 · US
Multi-column scanning electron microscopy system
US-10354832-B2 · Jul 16, 2019 · US
Recent patents
Latest publications not already listed above.
Permanent-magnet particle beam apparatus and method incorporating a non-magnetic metal portion for tunability
US-10211021-B2 · Feb 19, 2019 · US
Multi-Column Scanning Electron Microscopy System
US-2018358200-A1 · Dec 13, 2018 · US
Multi-Column Scanning Electron Microscopy System
US-2018226219-A1 · Aug 9, 2018 · US
Permanent-magnet particle beam apparatus and method incorporating a non-magnetic metal portion for tunability
US-2017294286-A1 · Oct 12, 2017 · US
Apparatus and method for optical inspection, magnetic field and height mapping
US-9513230-B2 · Dec 6, 2016 · US
Asymmetrical detector design and methodology
US-9418819-B2 · Aug 16, 2016 · US
Dummy barrier layer features for patterning of sparsely distributed metal features on the barrier with cmp
US-2015076697-A1 · Mar 19, 2015 · US
Asymmetrical detector design and methodology
US-2015069234-A1 · Mar 12, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 10 |
| Kla Corp | 9 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/28 | 12 |
| H01J37/143 | 6 |
| H01J37/14 | 6 |
| H01J37/10 | 5 |
| H01J37/1472 | 5 |