Reference image grouping in overlay metrology
US-11861824-B1 · Jan 2, 2024 · US
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Peled Einat patents
Peled Einat is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Peled Einat |
| Total patents | 9 |
| First publication | Oct 18, 2018 |
| Latest publication | Jan 2, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer transport, using quantum computing
US-11615974-B2 · Mar 28, 2023 · US
Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer transport, using quantum computing
US-2021335638-A1 · Oct 28, 2021 · US
Overlay measurement using multiple wavelengths
US-11158548-B2 · Oct 26, 2021 · US
Overlay measurement using multiple wavelengths
US-2020381312-A1 · Dec 3, 2020 · US
Quick adjustment of metrology measurement parameters according to process variation
US-10699969-B2 · Jun 30, 2020 · US
Target location in semiconductor manufacturing
US-10504802-B2 · Dec 10, 2019 · US
Quick Adjustment Of Metrology Measurement Parameters According To Process Variation
US-2019074227-A1 · Mar 7, 2019 · US
Target Location in Semiconductor Manufacturing
US-2018301385-A1 · Oct 18, 2018 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 6 |
| Kla Corp | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/203 | 6 |
| H10P72/0604 | 6 |
| H01L21/67253 | 6 |
| G03F7/70633 | 5 |
| H01L22/12 | 5 |