Plasma systems and methods for using square-shaped pulse signals
US-2025239434-A1 · Jul 24, 2025 · US
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Patrick Roger patents
Patrick Roger is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Patrick Roger |
| Total patents | 12 |
| First publication | Mar 8, 2016 |
| Latest publication | Jul 24, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
High energy atomic layer etch of a carbon containing layer
US-2025218774-A1 · Jul 3, 2025 · US
Fast atomic layer etch
US-2025210363-A1 · Jun 26, 2025 · US
Compact high density plasma source
US-12198896-B2 · Jan 14, 2025 · US
Distributed plasma source array
US-2023290611-A1 · Sep 14, 2023 · US
Compact high density plasma source
US-2021183619-A1 · Jun 17, 2021 · US
Mobile connectivity and control of semiconductor manufacturing equipment
US-9927798-B2 · Mar 27, 2018 · US
Method and apparatus for diagnosing status of parts in real time in plasma processing equipment
US-9541514-B2 · Jan 10, 2017 · US
Mobile device user interface for supporting service maintenance and tracking activities in semiconductor tool
US-2016104128-A1 · Apr 14, 2016 · US
Mobile connectivity and control of semiconductor manufacturing equipment
US-2016103445-A1 · Apr 14, 2016 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 12 |
| I Am Res Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32174 | 4 |
| H01J37/32165 | 3 |
| H01J37/3211 | 3 |
| H01J37/321 | 3 |
| G01N17/00 | 3 |