Method and apparatus for diagnosing status of parts in real time in plasma processing equipment

Patent metadata

Field	Value
Publication number	US-9279758-B2
Application number	US-201213706612-A
Country	US
Kind code	B2
Filing date	Dec 6, 2012
Priority date	Sep 4, 2007
Publication date	Mar 8, 2016
Grant date	Mar 8, 2016

Abstract

Apparatus and methods for diagnosing status of a consumable part of a plasma reaction chamber, the consumable part including at least one conductive element embedded therein. The method includes the steps of: coupling the conductive element to a power supply so that a bias potential relative to the ground is applied to the conductive element; exposing the consumable part to plasma erosion until the conductive element draws a current from the plasma upon exposure of the conductive element to the plasma; measuring the current; and evaluating a degree of erosion of the consumable part due to the plasma based on the measured current.

First claim

What is claimed is:

1. A method of diagnosing status of a consumable part of a plasma reaction chamber, the consumable part including conductive elements embedded therein, comprising:
coupling the conductive elements to a power supply so that a bias potential relative to the ground is applied to the conductive elements;
exposing the consumable part to plasma erosion until one of the conductive elements draws a current from the plasma upon exposure of the conductive element to the plasma;
measuring the current; and
evaluating a degree of erosion of the consumable part due to the plasma based on the measured current;
wherein the conductive elements are electrically connected to each other in series by a conducting wire.

2. The method of claim 1 , wherein the step of measuring the current includes:
interposing a resistor between the conductive elements and power supply in series;
measuring a voltage across the resistor; and
determining the current based on the measured voltage.

3. The method of claim 1 , further comprising:
triggering a notification when the current increases to a preset threshold level.

4. The method of claim 1 , wherein the consumable part is formed of conducting material and the conducting elements are surrounded by electrically insulating material such that the conducting elements are electrically insulated from the consumable part.

5. The method of claim 1 , wherein the consumable part is formed of dielectric material.

6. The method of claim 1 , wherein each of the conducting elements has a pin shape.

7. The method of claim 1 , wherein each of the conducting elements has a generally polygonal shape.

8. The method of claim 1 , wherein each of the conducting elements has a generally annular shape.

9. The method of claim 1 , wherein the current is selected from the group consisting of positive ion current and negative electron current.

10. The method of claim 1 , further comprising replacing the consumable part with a new consumable part.

11. The method of claim 1 , wherein
a probe circuit is coupled to the conductive elements; and
the power supply is coupled to the probe circuit and ground to apply the bias potential to the conductive elements relative to the ground,
wherein the conductive elements are operative to draw the current from the plasma and the probe circuit is operative to measure the current.

12. The method of claim 1 , wherein the consumable part is of dielectric material and is selected from the group consisting of edge ring and confinement ring.

13. The method of claim 1 , wherein the power supply is a DC power source.

14. The method of claim 11 , wherein the probe circuit includes a resistor and a voltmeter to measure an electrical potential across the resistor.

15. The method of claim 1 , wherein the consumable part is formed of conductive material and the conductive elements are embedded in the consumable part and electrically insulated from the conductive material by a dielectric layer.

16. The method of claim 15 , wherein the consumable part is an electrode for generating the plasma.

17. The method of claim 1 , further comprising processing a semiconductor substrate in a plasma reaction chamber.

Assignees

• Lam Res Corp

Inventors

• Patrick Roger

Classifications

• G01N17/00 Primary

  Investigating resistance of materials to the weather, to corrosion, or to light · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• Y10T29/49004

  including measuring or testing of device or component part · CPC title

• G01N17/04

  Corrosion probes · CPC title

• G01N27/20 Primary

  Investigating the presence of flaws · CPC title