Mobile connectivity and control of semiconductor manufacturing equipment

Patent metadata

Field	Value
Publication number	US-9927798-B2
Application number	US-201514876213-A
Country	US
Kind code	B2
Filing date	Oct 6, 2015
Priority date	Oct 10, 2014
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

Integration of semiconductor tool maintenance operations on mobile devices to allow technicians to more accurately perform semiconductor tool maintenance and to allow more accurate analysis of data to improve maintenance procedures to be more repeatable, consistent, and efficient. Remote control of maintenance operations for the semiconductor tool via a portable electronic device decreases the time required to service semiconductor tools and thus increase throughput.

First claim

What is claimed:

1. A method for conducting semiconductor processing tool maintenance, the method comprising:
tethering a portable electronic device to a semiconductor processing tool, whereby the portable electronic device is connected to the semiconductor processing tool so that data is transferrable between the semiconductor processing tool and the portable electronic device;
providing to the semiconductor processing tool via the portable electronic device instructions for maintenance of the semiconductor processing tool; and
implementing the maintenance instructions on the semiconductor processing tool;
wherein the providing and implementing comprise:
(a) determining, via the portable electronic device, that a user is performing at least one action associated with maintenance on the semiconductor processing tool, wherein the maintenance includes at least a first task and a second task;
(b) tracking, with the portable electronic device, a time spent on the maintenance, wherein the time spent on the maintenance includes at least a time spent on the first task and a time spent on the second task;
(c) determining, with the portable electronic device, that the user is performing at least one action associated with the first task;
(d) providing, responsive to (c), instructions associated with the first task to the user via the portable electronic device;
(e) tracking, responsive to (c) and with the portable electronic device, the time spent on the first task;
(f) determining, with the portable electronic device, that the user is performing at least one action associated with the second task;
(g) providing, responsive to (f), instructions associated with the second task to the user via the portable electronic device;
(h) tracking, responsive to (f) and with the portable electronic device, the time spent on the second task; and
(i) outputting the time spent on the maintenance of the semiconductor processing tool, the time spent on the first task, and the time spent on the second task from the portable electronic device to an associated computing device.

2. The method of claim 1 , wherein the portable electronic device is a tablet.

3. The method of claim 1 , wherein the tethering is via a wireless connection.

4. The method of claim 1 , wherein the tethering is via a hardwired connection.

5. The method of claim 1 , wherein the instructions for maintenance comprise instructions to control functions of the semiconductor processing tool selected from the group consisting of pressurizing a semiconductor processing chamber, shutting off precursor flow, powering up or powering down equipment, and opening the chamber doors.

6. The method of claim 1 , further comprising the semiconductor processing tool sending telemetry data to the portable electronic device.

7. The method of claim 6 , wherein the telemetry data relates to performance of the semiconductor processing tool or progress of a maintenance operation.

8. The method of claim 7 , wherein the telemetry data is outputted via the portable electronic device by being displayed or by being audibly communicated.

9. The method of claim 8 , further comprising communicating the telemetry data via the portable electronic device to another electronic device.

10. The method of claim 6 , wherein the telemetry data comprises data on time spent on semiconductor processing tool maintenance tasks and information on delays and issues.

11. The method of claim 1 , wherein the portable electronic device comprises a user interface for semiconductor processing tool selection and control.

12. A system for semiconductor processing tool maintenance, the system comprising:
a semiconductor processing tool; and
a portable electronic device tethered to the semiconductor processing tool, whereby the portable electronic device is communicatively coupled to the semiconductor processing tool so that data is transferrable between the semiconductor processing tool and the portable electronic device, the portable electronic device comprising a display, a user input interface, and a processor communicatively coupled to the display, and the user input interface, the processor configured to operate the portable electronic device for providing to the semiconductor processing tool via the portable electronic device instructions for maintenance of the semiconductor processing tool for implementation on the semiconductor processing tool;
wherein the instructions for maintenance of the semiconductor processing tool comprise:
(a) determining, via the portable electronic device, that a user is performing at least one action associated with maintenance on a semiconductor processing tool, wherein the maintenance includes at least a first task and a second task;
(b) tracking, with the portable electronic device, a time spent on the maintenance, wherein the time spent on the maintenance includes at least a time spent on the first task and a time spent on the second task;
(c) determining, with the portable electronic device, that the user is performing at least one action associated with the first task;
(d) providing, responsive to (c), instructions associated with the first task to the user via the portable electronic device;
(e) tracking, responsive to (c) and with the portable electronic device, the time spent on the first task;
(f) determining, with the portable electronic device, that the user is performing at least one action associated with the second task;
(g) providing, responsive to (f), instructions associated with the second task to the user via the portable electronic device;
(h) tracking, responsive to (f) and with the portable electronic device, the time spent on the second task; and
(i) outputting the time spent on the maintenance of the semiconductor processing tool, the time spent on the first task, and the time spent on the second task from the portable electronic device to an associated computing device.

13. The system of claim 12 , further comprising a server device communicatively coupled with the portable electronic device.

14. The system of claim 12 , wherein the portable electronic device is a tablet.

15. The system of claim 12 , wherein the tethering is via a wireless connection.

16. The system of claim 12 , wherein the instructions for maintenance comprise instructions to control functions of the semiconductor processing tool selected from the group consisting of pressurizing a semiconductor processing chamber, shutting off precursor flow, powering up or powering down equipment, and opening the chamber doors.

17. The system of claim 12 , further comprising the semiconductor processing tool sending telemetry data to the portable electronic device.

18. The system of claim 12 , wherein the portable electronic device comprises a user interface for semiconductor processing tool selection and control.

Assignees

• Lam Res Corp

Inventors

• Patrick Roger
• Huang Chung Ho
• Gosselin Simon
• Wong Vincent
• Ramnarine Ronald
• Newton Neal K
• Shah Mukesh
• Hoversten Kerwin
• Ahrens Robert
• Mora Marco

Classifications

• G05B2219/50185

  Monitoring, detect failures, control of efficiency of machine, tool life · CPC title

• G05B2219/45031

  Manufacturing semiconductor wafers · CPC title

• G05B2219/31202

  Semiconductor equipment communication standard SECS · CPC title

• G05B19/4065 Primary

  Monitoring tool breakage, life or condition · CPC title

• G05B19/4184 Primary

  characterised by fault tolerance, reliability of production system · CPC title