Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
US-11950384-B2 · Apr 2, 2024 · US
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Pai Uday patents
Pai Uday is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Pai Uday |
| Total patents | 15 |
| First publication | Jun 18, 2015 |
| Latest publication | Apr 2, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Deposition methods and apparatus for piezoelectric applications
US-2023320223-A1 · Oct 5, 2023 · US
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
US-2023175131-A1 · Jun 8, 2023 · US
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
US-11602064-B2 · Mar 7, 2023 · US
Edge load ring
US-11440159-B2 · Sep 13, 2022 · US
Methods and apparatus for processing a substrate using improved shield configurations
US-2022213590-A1 · Jul 7, 2022 · US
Edge load ring
US-2022097202-A1 · Mar 31, 2022 · US
Dynamic Electrical and Fluid Delivery System with Indexing Motion for Batch Processing Chambers
US-2022071037-A1 · Mar 3, 2022 · US
Fabrication of piezoelectric device with pmnpt layer
US-2021143320-A1 · May 13, 2021 · US
Target retaining apparatus
US-10199204-B2 · Feb 5, 2019 · US
Recent patents
Latest publications not already listed above.
Physical vapor deposition (PVD) target having low friction pads
US-9960021-B2 · May 1, 2018 · US
Process kit shield for plasma enhanced processing chamber
US-9343274-B2 · May 17, 2016 · US
Substrate processing system with mechanically floating target assembly
US-9303311-B2 · Apr 5, 2016 · US
Target retaining apparatus
US-2015203960-A1 · Jul 23, 2015 · US
Physical vapor deposition (pvd) target having low friction pads
US-2015170888-A1 · Jun 18, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 15 |
| Young Donny | 1 |
| Ritchie Alan | 1 |
| Pai Uday | 1 |
| Rasheed Muhammad | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/3435 | 5 |
| C23C14/3407 | 4 |
| C23C16/4586 | 4 |
| C23C16/4588 | 4 |
| H05K5/0247 | 4 |