High power low pressure UV bulb with plasma resistant coating

Patent metadata

Field	Value
Publication number	US-10354857-B2
Application number	US-201615389930-A
Country	US
Kind code	B2
Filing date	Dec 23, 2016
Priority date	Dec 23, 2016
Publication date	Jul 16, 2019
Grant date	Jul 16, 2019

Abstract

An envelope of an ultraviolet (UV) bulb comprises a tube of UV transmissive material configured to contain a UV emissive material and a plasma resistant coating on an inner surface of the tube wherein the coating has been deposited by atomic layer deposition (ALD) and is the only material attached to the inner surface of the tube. The tube can be an endless tube having a circular shape and the coating can be an ALD aluminum oxide coating. The UV transmissive material can comprise quartz or fused silica and the tube can have a wall thickness of about 1 to about 2 mm. The coating can have a thickness of no greater than about 200 nm such as about 120 nm to 160 nm. The circular tube can be formed into a torus shape which can have an outer diameter of about 200 mm and the tube itself can have an outer diameter of about 30 mm. The ALD aluminum oxide coating can be a pinhole free conformal coating. A UV bulb comprising the envelope can contain mercury and inert gas such as argon with pressure inside the UV bulb below 100 Torr. A method of curing a film on a semiconductor substrate, comprises supporting a semiconductor substrate in a curing chamber and exposing a layer on the semiconductor substrate to UV radiation produced by the UV bulb. Other uses include semiconductor substrate surface cleaning or sterilization of fluids and objects.

First claim

What is claimed is:

1. An envelope of an ultraviolet (UV) bulb, the envelope comprising:
a tube of UV transmissive material configured to contain a UV emissive material; and
a plasma resistant coating on an inner surface of the tube wherein the coating has been deposited by atomic layer deposition (ALD) and is the only material attached to the inner surface of the tube, wherein the coating consists of aluminum oxide.

2. The envelope of claim 1 , wherein the tube is an endless tube having a circular shape.

3. The envelope of claim 1 , wherein the UV transmissive material comprises quartz or fused silica.

4. The envelope of claim 1 , wherein the tube has a wall thickness of about 1 to about 2 mm.

5. The envelope of claim 1 , wherein the coating has a thickness of at least 100 nm and no greater than about 200 nm.

6. The envelope of claim 1 , wherein the coating has a thickness of about 120 to 160 nm.

7. The envelope of claim 2 , wherein the endless tube has an outer torus diameter of about 200 mm and the tube has an outer diameter of about 30 mm.

8. The envelope of claim 3 , wherein the ALD aluminum oxide coating is a pinhole free conformal coating.

9. A UV bulb comprising the envelope of claim 1 , wherein the envelope contains a UV emissive material and lacks a luminescent material inside the UV bulb.

10. The UV bulb of claim 9 , wherein the UV emissive material comprises mercury.

11. The UV bulb of claim 9 , wherein the tube is hermetically sealed and includes an inert gas.

12. The UV bulb of claim 9 , wherein the UV bulb is electrodeless and pressure inside the bulb is below 100 Torr.

13. The UV bulb of claim 9 , wherein tube has an outer diameter of about 30 mm and the tube is an endless tube having a circular shape with an outer torus diameter of about 200 mm.

14. A UV lamp assembly including the UV bulb of claim 9 .

15. A method of processing a semiconductor substrate, comprising supporting a semiconductor substrate in a processing chamber; and exposing the semiconductor substrate to UV radiation produced by the UV bulb of claim 9 .

16. The method of claim 15 , wherein the semiconductor substrate includes one or more dielectric layers and the UV radiation removes porogens from the one or more dielectric layers, increases strength of the one or more dielectric layers and/or repairs damage to the one or more dielectric layers.

17. A method of processing a semiconductor substrate, comprising supporting a semiconductor substrate in a processing chamber; generating ozone by exposing oxygen to UV radiation produced by the UV bulb of claim 9 , and cleaning the semiconductor substrate surface with the ozone.

18. A method of sterilizing a fluid or object, comprising:
energizing the UV bulb of claim 9 and exposing UV radiation produced by the UV bulb to a fluid or object for a duration of time sufficient to provide effective sterilization of microorganisms within the fluid or effective sterilization of microorganisms on a surface of the object.

Assignees

• Lam Res Corp

Inventors

• Chen Xiaolan
• Mudrow Matthew
• Bailey Curtis
• Lau Stephen
• Lamar Mitchell

Classifications

• H10P72/0466

  characterised by the construction of the load-lock chamber · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P34/00

  Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices · CPC title

• H01J65/042

  by an external electromagnetic field · CPC title