Method of obtaining output flow rate of flow rate controller and method of processing workpiece
US-11231313-B2 · Jan 25, 2022 · US
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Miyoshi Risako patents
Miyoshi Risako is listed as an inventor on 26 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Miyoshi Risako |
| Total patents | 26 |
| First publication | Nov 19, 2015 |
| Latest publication | Jan 25, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of determining flow rate of a gas in a substrate processing system
US-10876870-B2 · Dec 29, 2020 · US
Substrate processing system and method of determining flow rate of gas
US-10871786-B2 · Dec 22, 2020 · US
Method of inspecting flow rate measuring system
US-10859426-B2 · Dec 8, 2020 · US
Method of arranging treatment process
US-10845119-B2 · Nov 24, 2020 · US
Method of inspecting gas supply system, method of calibrating flow controller, and method of calibrating secondary reference device
US-10788356-B2 · Sep 29, 2020 · US
Method of inspecting gas supply system
US-10692743-B2 · Jun 23, 2020 · US
Method of inspecting gas supply system
US-10692744-B2 · Jun 23, 2020 · US
Substrate processing system and method of determining flow rate of gas
US-2019301912-A1 · Oct 3, 2019 · US
Method for inspecting shower plate of plasma processing apparatus
US-10424466-B2 · Sep 24, 2019 · US
Recent patents
Latest publications not already listed above.
Method of determining flow rate of gas
US-2019212176-A1 · Jul 11, 2019 · US
Method of inspecting gas supply system
US-10274972-B2 · Apr 30, 2019 · US
Method of inspecting flow rate measuring system
US-2019063987-A1 · Feb 28, 2019 · US
Method for preventing explosion of exhaust gas in decompression processing apparatus
US-10168049-B2 · Jan 1, 2019 · US
Method of inspecting gas supply system
US-2018374726-A1 · Dec 27, 2018 · US
Method of inspecting gas supply system
US-2018374727-A1 · Dec 27, 2018 · US
Method of obtaining output flow rate of flow rate controller and method of processing workpiece
US-2018299908-A1 · Oct 18, 2018 · US
Method of calculating output flow rate of flow rate controller
US-10031007-B2 · Jul 24, 2018 · US
Method of inspecting gas supply system, method of calibrating flow controller, and method of calibrating secondary reference device
US-2018073911-A1 · Mar 15, 2018 · US
Method for inspecting shower plate of plasma processing apparatus
US-2018053637-A1 · Feb 22, 2018 · US
Method of arranging treatment process
US-2017261258-A1 · Sep 14, 2017 · US
Method of calculating output flow rate of flow rate controller
US-2017074694-A1 · Mar 16, 2017 · US
Method of inspecting gas supply system
US-2017075361-A1 · Mar 16, 2017 · US
Plasma processing apparatus
US-9240307-B2 · Jan 19, 2016 · US
Plasma processing apparatus and gas supply method therefor
US-9236230-B2 · Jan 12, 2016 · US
Method for preventing explosion of exhaust gas in decompression processing apparatus
US-2015330631-A1 · Nov 19, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 26 |
| Kato Yoshiyuki | 1 |
| Amikura Norihiko | 1 |
| Miyoshi Risako | 1 |
| Fukasawa Kimihiro | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0402 | 10 |
| H01J37/32449 | 9 |
| G01F25/15 | 8 |
| H10P72/0602 | 8 |
| H10P72/0604 | 8 |