Finger Electrostatic Chuck for High Resistance Substrate Chucking
US-2025015733-A1 · Jan 9, 2025 · US
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Marshall Ross patents
Marshall Ross is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Marshall Ross |
| Total patents | 8 |
| First publication | May 28, 2015 |
| Latest publication | Jan 9, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Electrostatic Chuck
US-2024266200-A1 · Aug 8, 2024 · US
Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes
US-11031273-B2 · Jun 8, 2021 · US
Physical vapor deposition (pvd) electrostatic chuck with improved thermal coupling for temperature sensitive processes
US-2020185247-A1 · Jun 11, 2020 · US
Methods and devices using PVD ruthenium
US-10388532-B2 · Aug 20, 2019 · US
Methods and Devices Using PVD Ruthenium
US-2018096852-A1 · Apr 5, 2018 · US
Pad design for electrostatic chuck surface
US-9613846-B2 · Apr 4, 2017 · US
Pad design for electrostatic chuck surface
US-2015146339-A1 · May 28, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 8 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/72 | 7 |
| H10P72/722 | 6 |
| H01L21/6833 | 6 |
| H10P72/7614 | 4 |
| H10P72/0434 | 4 |