Reported location correction system
US-10565573-B2 · Feb 18, 2020 · US
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Lu Xiaoxu patents
Lu Xiaoxu is listed as an inventor on 18 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lu Xiaoxu |
| Total patents | 18 |
| First publication | Feb 12, 2015 |
| Latest publication | Feb 18, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
183 nm CW laser and inspection system
US-10429719-B2 · Oct 1, 2019 · US
183 nm CW Laser and Inspection System
US-2019107766-A1 · Apr 11, 2019 · US
183 nm CW laser and inspection system
US-10175555-B2 · Jan 8, 2019 · US
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
US-10044164-B2 · Aug 7, 2018 · US
CW DUV laser with improved stability
US-10044166-B2 · Aug 7, 2018 · US
High brightness laser-sustained plasma broadband source
US-10032619-B2 · Jul 24, 2018 · US
183 nm CW Laser And Inspection System
US-2018188633-A1 · Jul 5, 2018 · US
High Brightness Laser-Sustained Plasma Broadband Source
US-2018114687-A1 · Apr 26, 2018 · US
High brightness laser-sustained plasma broadband source
US-9865447-B2 · Jan 9, 2018 · US
Recent patents
Latest publications not already listed above.
High Brightness Laser-Sustained Plasma Broadband Source
US-2017278694-A1 · Sep 28, 2017 · US
CW DUV Laser With Improved Stability
US-2017070025-A1 · Mar 9, 2017 · US
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
US-9525265-B2 · Dec 20, 2016 · US
Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generators Using Mirrors And/or Prisms
US-2016359292-A1 · Dec 8, 2016 · US
CW DUV laser with improved stability
US-9509112-B2 · Nov 29, 2016 · US
Multi-spot illumination for improved detection sensitivity
US-9494531-B2 · Nov 15, 2016 · US
Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generators Using Mirrors And/Or Prisms
US-2015372446-A1 · Dec 24, 2015 · US
Multi-Spot Illumination For Improved Detection Sensitivity
US-2015041666-A1 · Feb 12, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 17 |
| Kla—Tencor Corp | 1 |
| Fomitchev Alexei | 1 |
| Epelman Aleksander | 1 |
| Kayton Nelli | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G02F1/353 | 7 |
| G02F1/3558 | 7 |
| H01S3/109 | 7 |
| G02F1/354 | 7 |
| G02F2001/354 | 6 |