Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms

Patent metadata

Field	Value
Publication number	US-9525265-B2
Application number	US-201514596738-A
Country	US
Kind code	B2
Filing date	Jan 14, 2015
Priority date	Jun 20, 2014
Publication date	Dec 20, 2016
Grant date	Dec 20, 2016

Abstract

A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.

First claim

The invention claimed is:

1. A flat-top beam generator comprising:
a laser pulse repetition rate multiplier including an optical cavity comprising a beam splitter, two spherical mirrors and a beam shifter, said laser pulse repetition rate multiplier positioned to receive input laser pulses from a laser such that said input laser pulses are directed into said optical cavity and exit said optical cavity as output laser pulses having an output pulse repetition rate that is at least two times that of the input laser pulses,
wherein said optical cavity is configured such that each said laser pulse input from said laser is directed along a plurality of optical paths defined by said two spherical mirrors, wherein each of the plurality of optical paths passes through said beam shifter and said beam splitter,
wherein the beam shifter is configured to laterally displace said each laser pulse directed along a first optical path of said plurality of optical paths to a second optical path of said plurality of optical paths, and
wherein said beam splitter is configured to reflect portions of said laser pulses passing along said first and second optical paths such that said reflected portions respectively form first and second output laser pulses, said first output laser pulses being laterally displaced with respect to said second output laser pulses such that a time averaged output intensity of said first and second output laser pulses has a substantially flat profile in the direction of the lateral displacement.

2. The flat-top beam generator of claim 1 , wherein the beam shifter comprises one of an isosceles triangle prism, and a Dove prism.

3. The flat-top beam generator of claim 1 , wherein the beam shifter is configured such that the lateral displacement is approximately equal to 0.5 (half) of a beam waist radius of the input laser pulses.

4. The flat-top beam generator of claim 3 , wherein the beam shifter is configured such that the optical cavity includes two separate round-trip optical paths, and such that the beam shifter diverts part of the energy of each laser pulse from a first path to a second path.

5. The flat-top beam generator of claim 4 , wherein the beam shifter is configured such that the beam shifter further diverts part of the energy of each laser pulse from the second path to the first path.

6. The flat-top beam generator of claim 1 , wherein the laser pulse repetition rate multiplier is configured such that the output laser pulse repetition rate is at least four times the input laser pulse repetition rate.

7. The flat-top beam generator of claim 6 , wherein the beam shifter is configured such that the output laser pulses have a substantially flat output profile with said time averaged output intensity having a variation of 20% or less and having a width of between approximately 2 and 2.5 times a beam waist radius of the input laser pulses.

8. An inspection system comprising:
a DUV or VUV laser generating a series of laser pulses;
a laser pulse repetition rate multiplier that multiplies a repetition rate of the laser pulses;
optics including an objective lens for directing an output of the laser pulse repetition rate multiplier to a sample; and
optics for collecting light reflected or scattered from the sample and directing the light to a detector;
wherein the laser pulse repetition rate multiplier includes two spherical mirrors forming one or more ring cavities, a beam splitter that directs a first fraction of the energy of each input laser pulse into the one or more ring cavities, and a beam shifter,
wherein said one or more ring cavities are configured such that each said laser pulse input from said DUV or VUV laser is directed along a plurality of optical paths defined by said two spherical mirrors, wherein each of the plurality of optical paths passes through said beam shifter and said beam splitter,
whereby the beam shifter is configured to laterally displace said each laser pulse directed along a first optical path of said plurality of optical paths to a second optical path of said plurality of optical paths, and
wherein the laser pulse repetition rate multiplier is configured to reflect portions of said laser pulses passing along said first and second optical paths such that said reflected portions respectively form first and second output pulses that are laterally displaced and partially overlapped with one another so as to form a time averaged output intensity profile that has a substantially flat top.

9. The inspection system of claim 8 , wherein the system implements one of an unpatterned wafer inspection system, a patterned wafer inspection system, a photomask inspection system, and a metrology system.

Assignees

• Kla Tencor Corp

Inventors

• Chuang Yung-Ho Alex
• Lu Xiaoxu
• Liou Justin Dianhuan
• Armstrong J Joseph
• Deng Yujun
• Fielden John

Classifications

• H01S3/0071

  Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction · CPC title

• H01S3/08059

  Constructional details of the reflector, e.g. shape (mirrors in general G02B5/08; mountings for mirrors G02B7/18) · CPC title

• H01S2301/206

  Top hat profile · CPC title

• H01S3/005

  Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping (shaping laser beam for working metal or other materials B23K26/06; optical elements, systems or apparatus in general G02B) · CPC title

• H01S2301/203

  with at least one hole in the intensity distribution, e.g. annular or doughnut mode · CPC title