High brightness laser-sustained plasma broadband source

Patent metadata

Field	Value
Publication number	US-10032619-B2
Application number	US-201715842540-A
Country	US
Kind code	B2
Filing date	Dec 14, 2017
Priority date	Mar 28, 2016
Publication date	Jul 24, 2018
Grant date	Jul 24, 2018

Abstract

A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.

First claim

What is claimed:

1. A metrology system comprising:
a light source; and
a spectrometer, wherein the light source comprises:
a gas containment structure;
a plasma ignition device;
a pump laser configured to generate a pump beam including illumination of a wavelength proximate to a weak absorption line of a neutral gas contained in the gas containment structure;
one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure; and
one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist;

wherein the spectrometer comprises a dispersive element and a detector array,
wherein the metrology system is configured to direct the broadband radiation from the light source to a sample, and direct broadband radiation reflected from the sample to the spectrometer.

2. The metrology system of claim 1 , wherein the plasma ignition device comprises:
at least one of a set of electrodes or a pulsed laser.

3. The metrology system of claim 1 , wherein the gas containment structure comprises:
at least one of a plasma bulb, a plasma cell, or a plasma chamber.

4. The metrology system of claim 1 , wherein the gas comprises:
at least one of an inert gas, a non-inert gas, or a mixture of two or more gases.

5. The metrology system of claim 4 , wherein the gas comprises:
at least one of xenon, argon, or mercury.

6. The metrology system of claim 1 , wherein the pump laser comprises:
at least one of a fiber laser or a solid-state laser.

7. The metrology system of claim 1 , wherein the wavelength of light of the pump beam is approximately 1070 nm.

8. The metrology system of claim 1 , wherein the light source further comprises:
a second pump laser configured to generate a second pump beam including light of a wavelength not absorbed by the neutral gas, wherein the output wavelength of the second pump laser is absorbed by an ionized gas in the plasma.

9. The metrology system of claim 8 , wherein the wavelength of light of the second pump beam is between 515 nm and 540 nm.

10. The metrology system of claim 1 , wherein the one or more anamorphic illumination optics comprise:
at least one of an acylindrical lens or an aspheric lens.

11. The metrology system of claim 1 , wherein the one or more anamorphic illumination optics comprise:
an aberration compensator configured to compensate for aberration caused by at least one of a shape of the gas containment structure or the pump laser.

12. The metrology system of claim 1 , wherein the elliptical beam waist has a ratio of major axis to minor axis of at least 10.

13. The metrology system of claim 12 , wherein the one or more anamorphic illumination optics are configured to focus with a numerical aperture (NA) greater than 0.5 in the direction corresponding to the shorter axis of the elliptical beam waist, and with an NA less than 0.2 in the direction corresponding to the longer axis of the elliptical beam waist.

14. The metrology system of claim 12 , wherein the one or more anamorphic illumination optics are configured such that the minor axis of the elliptical beam waist is less than 5 μm and the major axis of the elliptical beam waist is between 50 μm and 500 μm.

15. The metrology system of claim 1 , wherein the first set of collection optics are configured to collect the broadband radiation in a direction substantially aligned with a longer axis of the elliptical beam waist.

16. The metrology system of claim 1 , wherein the light source further comprises:
a reflector placed on an opposite side of the gas containment structure from the first collection optics and configured to focus broadband radiation back to the plasma substantially overlapping the beam waist of the pump laser.

17. The metrology system of claim 1 , wherein the light source further comprises:
a reflector configured to reflect and focus unabsorbed pump laser illumination to the plasma substantially overlapped with the beam waist of the pump laser.

18. The metrology system of claim 1 , further comprising:
a second set of collection optics configured to collect illumination emitted by the plasma on an opposite side of the gas containment structure from the first set of collection optics.

19. The metrology system of claim 1 , wherein the anamorphic illumination optics are further configured to create a beam profile that is flatter than a Gaussian in the direction of the major axis of the elliptical beam waist.

20. The metrology system of claim 1 , wherein the dispersive element is configured to disperse the broadband radiation reflected from the sample as a function of wavelength in one direction, and as a function of the angle of incidence of the broadband radiation with respect to the sample source in an orthogonal direction.

Assignees

• Kla Tencor Corp

Inventors

• Chuang Yung-Ho Alex
• Lu Xiaoxu
• Liou Justin
• Fielden John

Classifications

• H05H1/24

  Generating plasma {(nuclear fusion reactors G21B1/00; gas-filled discharge reactors H01J37/32)} · CPC title

• H01J61/16

  having helium, argon, neon, krypton, or xenon as the principle constituent · CPC title

• H01J61/025 Primary

  Associated optical elements · CPC title

• H01J61/20

  mercury vapour · CPC title

• H01J65/042 Primary

  by an external electromagnetic field · CPC title