CW DUV laser with improved stability

Patent metadata

Field	Value
Publication number	US-9509112-B2
Application number	US-201414294019-A
Country	US
Kind code	B2
Filing date	Jun 2, 2014
Priority date	Jun 11, 2013
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 μm and 1.1 μm, a third harmonic generator module including one or more periodically poled non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and one of a fourth harmonic generator module and a fifth harmonic generator. The fourth harmonic generator module includes a cavity resonant at the fundamental frequency configured to combine the fundamental frequency with the third harmonic to generate a fourth harmonic. The fourth harmonic generator module includes either a cavity resonant at the fundamental frequency for combining the fundamental frequency with the third harmonic to generate a fifth harmonic, or a cavity resonant at the second harmonic frequency for combining the second harmonic and the third harmonic to generate the fifth harmonic.

First claim

The invention claimed is:

1. A deep ultra-violet (DUV) continuous wave (CW) laser comprising:
a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 μm and 1.1 μm;
a third harmonic generator module including at least one periodically poled first non-linear optical (NLO) crystal, said third harmonic generator module positioned to receive a first portion of the fundamental frequency and configured to generate a third harmonic; and
a fourth harmonic generator module comprising:
a plurality of mirrors configured to form a cavity resonant at the corresponding wavelength of the fundamental frequency;
a coupler configured to couple a second portion of the fundamental frequency in the cavity such that the second portion is directed along a cavity light path defined by the plurality of mirrors;
a second NLO crystal disposed in the cavity light path;
one or more lenses configured to focus the third harmonic inside the second NLO crystal such that the third harmonic overlaps the second fundamental portion inside the second NLO crystal, wherein the second NLO crystal is configured to combine said second portion of the fundamental frequency with the third harmonic to generate a fourth harmonic; and
a beam splitter configured to reflect an unconsumed portion of the third harmonic leaving the second NLO crystal away from said cavity light path such that said unconsumed third harmonic portion does not recirculate in the cavity.

2. The laser of claim 1 , wherein the third harmonic generator module does not use a resonant cavity.

3. The laser of claim 1 , wherein the third harmonic generator module further comprises a cavity that is resonant at the fundamental frequency.

4. The laser of claim 1 , wherein the at least one periodically poled first NLO crystal generates a second harmonic.

5. The laser of claim 1 , wherein the at least one periodically poled first NLO crystal generates the third harmonic.

6. The laser of claim 1 , wherein the at least one periodically poled first NLO crystal comprises a dual-period poled crystal for direct generation of the third harmonic.

7. The laser of claim 1 , wherein the third harmonic generator module comprises two periodically poled NLO crystals.

8. The laser of claim 1 , wherein the at least one periodically poled first NLO crystal is controlled in temperature to maximize third harmonic generation efficiency.

9. The laser of claim 1 , wherein the fundamental frequency is focused to an elliptical beam with a short axis substantially parallel to a poling depth of the at least one periodically poled first NLO crystal.

10. The laser of claim 1 , wherein the third harmonic generator module uses a periodically poled first NLO crystal with a domain period longer than 2 μm to achieve third-order quasi-phase matching for sum frequency generation of the third harmonic.

11. The laser of claim 1 , wherein electric-optic modulation is used to enhance third harmonic conversion efficiency.

12. A method of generating deep ultra-violet (DUV) continuous wave (CW) laser radiation comprising:
generating a fundamental frequency with a corresponding wavelength between about 1 μm and 1.1 μm;
converting a first portion of the fundamental frequency to a second harmonic using a periodically poled first NLO crystal;
combining another portion of the fundamental frequency with the second harmonic to generate a third harmonic;
generating a fourth harmonic by combining a second portion of the fundamental frequency with the third harmonic in a cavity resonant at the corresponding wavelength of the fundamental frequency, wherein said generating the fourth harmonic comprises focusing the third harmonic inside a second NLO crystal operably disposed in the cavity and configured to perform sum frequency generation of said second portion of the fundamental frequency and said third harmonic; and
reflecting an unconsumed portion of the third harmonic leaving the second NLO crystal such that said unconsumed third harmonic portion does not recirculate in the cavity.

13. The method of claim 12 , wherein the periodically poled first NLO crystal for second harmonic generation is not placed in any resonant cavity.

14. The method of claim 12 , wherein the first NLO crystal for second harmonic generation and another periodically poled NLO crystal for third harmonic generation are contained in another cavity resonant at the fundamental frequency.

15. The method of claim 12 , wherein the second harmonic and the third harmonic are generated using a dual-period poled crystal.

16. The method of claim 12 , wherein the second harmonic and the third harmonic are generated using two periodically poled NLO crystals.

17. The method of claim 12 , wherein the periodically poled first NLO crystal for second harmonic generation includes at least one of LiNbO 3 , SLT, LiTaO 3 , KTP, KTA, MgO:LiNbO 3 , and MgO:SLT.

18. The method of claim 12 , wherein the periodically poled first NLO crystal is controlled in temperature to maximize third harmonic generation efficiency.

19. The method of claim 12 , wherein the fundamental frequency is focused to an elliptical beam with a short axis substantially parallel to a poling depth of the periodically poled first NLO crystal.

20. The method of claim 12 , wherein the generation of the third harmonic uses a periodically poled crystal with a domain period longer than 2 μm to achieve third-order quasi-phase matching.

21. The method of claim 12 , wherein electric-optic modulation is used to enhance the third harmonic conversion efficiency.

22. The method of claim 12 , wherein said generating the fourth harmonic further comprises focusing the third harmonic inside a single bulk crystal comprising hydrogen-annealed CLBO, CBO, LBO, LB4 or BBO.

Assignees

• Kla Tencor Corp

Inventors

• Chuang Yung-Ho
• Lu Xiaoxu
• Fielden John

Classifications

• G02F2203/15

  involving resonance effects, e.g. resonantly enhanced interaction · CPC title

• G02F2201/17

  Multi-pass arrangements, i.e. arrangements to pass light a plurality of times through the same element, e.g. by using an enhancement cavity · CPC title

• H01S3/0092 Primary

  Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity (nonlinear frequency conversion per se G02F1/35) · CPC title

• G02F1/353 Primary

  Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams · CPC title

• G02F1/3558

  Poled materials, e.g. with periodic poling; Fabrication of domain inverted structures, e.g. for quasi-phase-matching [QPM] · CPC title