Method for adjusting a patterning process
US-12591178-B2 · Mar 31, 2026 · US
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Lin Chenxi patents
Lin Chenxi is listed as an inventor on 34 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lin Chenxi |
| Total patents | 34 |
| First publication | May 16, 2019 |
| Latest publication | Mar 31, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Active learning-based defect location identification
US-12548141-B2 · Feb 10, 2026 · US
Identification of hot spots or defects by machine learning
US-2025341785-A1 · Nov 6, 2025 · US
Stochastic-aware source mask optimization based on edge placement probability distribution
US-2025278026-A1 · Sep 4, 2025 · US
Identification of hot spots or defects by machine learning
US-12360461-B2 · Jul 15, 2025 · US
Overlay metrology based on template matching with adaptive weighting
US-2025044710-A1 · Feb 6, 2025 · US
Systems and methods for optimizing lithographic design variables using image-based failure rate model
US-2025028255-A1 · Jan 23, 2025 · US
Method to predict yield of a device manufacturing process
US-12055904-B2 · Aug 6, 2024 · US
Method to label substrates based on process parameters
US-12045555-B2 · Jul 23, 2024 · US
Method of manufacturing devices
US-12044980-B2 · Jul 23, 2024 · US
Recent patents
Latest publications not already listed above.
Method for controlling a manufacturing process and associated apparatuses
US-11947266-B2 · Apr 2, 2024 · US
Training machine learning models based on partial datasets for defect location identification
US-2024069450-A1 · Feb 29, 2024 · US
Active learning-based defect location identification
US-2023401694-A1 · Dec 14, 2023 · US
Method for determining root cause affecting yield in a semiconductor manufacturing process
US-11803127-B2 · Oct 31, 2023 · US
Method for determining corrections for lithographic apparatus
US-11754931-B2 · Sep 12, 2023 · US
Method for adjusting a patterning process
US-2023273529-A1 · Aug 31, 2023 · US
Method to predict yield of a device manufacturing process
US-11714357-B2 · Aug 1, 2023 · US
Identification of hot spots or defects by machine learning
US-11443083-B2 · Sep 13, 2022 · US
Identification of hot spots or defects by machine learning
US-2022277116-A1 · Sep 1, 2022 · US
Method for determining corrections for lithographic apparatus
US-2022252988-A1 · Aug 11, 2022 · US
Method for controlling a manufacturing process and associated apparatuses
US-2022026810-A1 · Jan 27, 2022 · US
Method to predict yield of a device manufacturing process
US-2022011728-A1 · Jan 13, 2022 · US
Method of manufacturing devices
US-2021397172-A1 · Dec 23, 2021 · US
Method for determining root cause affecting yield in a semiconductor manufacturing process
US-2021389677-A1 · Dec 16, 2021 · US
Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process
US-11181829-B2 · Nov 23, 2021 · US
Methods of guiding process models and inspection in a manufacturing process
US-11183434-B2 · Nov 23, 2021 · US
Method to predict yield of a device manufacturing process
US-2021325788-A1 · Oct 21, 2021 · US
Method to predict yield of a device manufacturing process
US-11086229-B2 · Aug 10, 2021 · US
Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process
US-2021132508-A1 · May 6, 2021 · US
Method to label substrates based on process parameters
US-2020356881-A1 · Nov 12, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 34 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/705 | 24 |
| G03F7/706837 | 22 |
| G03F7/70525 | 18 |
| G03F7/70616 | 15 |
| G06T2207/30148 | 11 |