Pressure control system for a multi-head processing chamber of a plasma processing apparatus
US-12347661-B2 · Jul 1, 2025 · US
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Li Junliang patents
Li Junliang is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Li Junliang |
| Total patents | 12 |
| First publication | Jul 14, 2016 |
| Latest publication | Jul 1, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Method for processing workpiece, plasma processing apparatus and semiconductor device
US-2024355634-A1 · Oct 24, 2024 · US
Method for processing workpiece, plasma processing apparatus and semiconductor device
US-12009220-B2 · Jun 11, 2024 · US
Pressure Control System for a Multi-Head Processing Chamber of a Plasma Processing Apparatus
US-2023012873-A1 · Jan 19, 2023 · US
Method for processing workpiece, plasma processing apparatus and semiconductor device
US-2023005752-A1 · Jan 5, 2023 · US
Method For Processing Workpiece, Plasma Processing Apparatus And Semiconductor Device
US-2023005739-A1 · Jan 5, 2023 · US
OLED encapsulation structure, display device and method for manufacturing OLED encapsulation structure
US-11081671-B2 · Aug 3, 2021 · US
Array substrate, manufacturing method thereof, and display device
US-10935857-B2 · Mar 2, 2021 · US
Array substrate, manufacturing method thereof, and display device
US-2020379307-A1 · Dec 3, 2020 · US
Filtering data objects
US-10394907-B2 · Aug 27, 2019 · US
Recent patents
Latest publications not already listed above.
Oled encapsulation structure, display device and method for manufacturing oled encapsulation structure
US-2019252641-A1 · Aug 15, 2019 · US
Filtering data objects
US-2016203228-A1 · Jul 14, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Beijing E Town Semiconductor Tech Co Ltd | 6 |
| Mattson Tech Inc | 6 |
| Boe Technology Group Co Ltd | 4 |
| Chengdu Boe Optoelect Tech Co | 4 |
| Alibaba Group Holding Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32449 | 5 |
| H01J2237/332 | 4 |
| H01J37/321 | 4 |
| H01J37/32431 | 3 |
| H10P50/283 | 3 |