Processing method of silicon nitride film and forming method of silicon nitride film
US-10017853-B2 · Jul 10, 2018 · US
Katayama Daisuke is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Katayama Daisuke |
| Total patents | 2 |
| First publication | Dec 14, 2017 |
| Latest publication | Jul 10, 2018 |
Publications ranked by popularity score, then publication date.
Latest publications not already listed above.
No data yet.
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 2 |
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P95/00 | 2 |
| H10P14/69433 | 2 |
| H10P14/6682 | 2 |
| H10P14/6532 | 2 |
| H10P14/6336 | 2 |