Plasma Processing Apparatus
US-2026094788-A1 · Apr 2, 2026 · US
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Kamata Eiki patents
Kamata Eiki is listed as an inventor on 63 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kamata Eiki |
| Total patents | 63 |
| First publication | Mar 7, 2019 |
| Latest publication | Apr 2, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Method for controlling plasma measurement system and plasma measurement system
US-2025357095-A1 · Nov 20, 2025 · US
Plasma processing apparatus, and plasma processing method
US-12444574-B2 · Oct 14, 2025 · US
Plasma processing apparatus
US-12412732-B2 · Sep 9, 2025 · US
Tuner, and impedance matching method
US-12407078-B2 · Sep 2, 2025 · US
Plasma Processing Apparatus and Plasma Processing Method
US-2025253138-A1 · Aug 7, 2025 · US
Plasma processing method and plasma processing apparatus
US-12338532-B2 · Jun 24, 2025 · US
Plasma processing apparatus and ceiling wall
US-12315700-B2 · May 27, 2025 · US
Substrate processing method and substrate processing apparatus
US-2025129474-A1 · Apr 24, 2025 · US
Plasma processing apparatus and plasma processing method
US-12283465-B2 · Apr 22, 2025 · US
Recent patents
Latest publications not already listed above.
Plasma Source and Plasma Processing Apparatus
US-2025104977-A1 · Mar 27, 2025 · US
Plasma Source and Plasma Processing Apparatus
US-2025104972-A1 · Mar 27, 2025 · US
Plasma Processing Apparatus and Method for Measuring Resonance Frequency
US-2025095973-A1 · Mar 20, 2025 · US
Plasma processing method and plasma processing apparatus
US-12243718-B2 · Mar 4, 2025 · US
Plasma measurement method
US-12237157-B2 · Feb 25, 2025 · US
Remote Plasma Device and Plasma Processing Apparatus
US-2024412949-A1 · Dec 12, 2024 · US
Plasma processing apparatus and plasma processing method
US-12165846-B2 · Dec 10, 2024 · US
Plasma processing apparatus, control method, and storing medium
US-2024404805-A1 · Dec 5, 2024 · US
Plasma Processing Apparatus
US-2024312767-A1 · Sep 19, 2024 · US
Plasma processing apparatus
US-12046453-B2 · Jul 23, 2024 · US
Plasma processing apparatus and plasma control method
US-2024203692-A1 · Jun 20, 2024 · US
Plasma processing apparatus
US-2024186115-A1 · Jun 6, 2024 · US
Plasma processing apparatus
US-2024186113-A1 · Jun 6, 2024 · US
Plasma processing apparatus and assembly method of resonator array structure
US-2024186114-A1 · Jun 6, 2024 · US
Plasma processing apparatus
US-2024170259-A1 · May 23, 2024 · US
Plasma processing device, and plasma processing method
US-2024170260-A1 · May 23, 2024 · US
Plasma processing apparatus and plasma processing method
US-11967485-B2 · Apr 23, 2024 · US
Control method and plasma processing apparatus
US-11887825-B2 · Jan 30, 2024 · US
Plasma processing apparatus and plasma state estimation method
US-2024030015-A1 · Jan 25, 2024 · US
Plasma processing apparatus and plasma processing method
US-2024030008-A1 · Jan 25, 2024 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 63 |
| The Univ Of Shiga Prefecture | 2 |
| Toyo Electron Ltd | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/3222 | 35 |
| H01J37/32238 | 24 |
| H01J37/32192 | 22 |
| H10P50/242 | 21 |
| H05H1/46 | 21 |