Substrate cleaning compositions, substrate cleaning method and substrate treating apparatus
US-11530375-B2 · Dec 20, 2022 · US
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Jeong Ji Soo patents
Jeong Ji Soo is listed as an inventor on 11 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Jeong Ji Soo |
| Total patents | 11 |
| First publication | Nov 22, 2018 |
| Latest publication | Dec 20, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus for processing substrate including cooling member closer to central axis than heating member
US-11410862-B2 · Aug 9, 2022 · US
Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same
US-11149234-B2 · Oct 19, 2021 · US
Apparatus for treating substrate
US-10908503-B2 · Feb 2, 2021 · US
Substrate cleaning compositions, substrate cleaning method and substrate treating apparatus
US-2020115660-A1 · Apr 16, 2020 · US
Apparatus for treating substrate
US-2020081347-A1 · Mar 12, 2020 · US
Method for treating substrate
US-2020026194-A1 · Jan 23, 2020 · US
Apparatus for processing substrate
US-2019333788-A1 · Oct 31, 2019 · US
Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same
US-2019241844-A1 · Aug 8, 2019 · US
Cleaning liquid supply unit, substrate treating apparatus including the same, and substrate treating method
US-2019057884-A1 · Feb 21, 2019 · US
Recent patents
Latest publications not already listed above.
Apparatus and method for manufacturing cleaning solution
US-2018335661-A1 · Nov 22, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semes Co Ltd | 11 |
| Samsung Electronics Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0414 | 10 |
| H10P72/0402 | 8 |
| H10P72/0432 | 6 |
| H10P72/0408 | 6 |
| H10P70/20 | 6 |