Substrate cleaning compositions, substrate cleaning method and substrate treating apparatus

Patent metadata

Field	Value
Publication number	US-11530375-B2
Application number	US-201916600166-A
Country	US
Kind code	B2
Filing date	Oct 11, 2019
Priority date	Oct 11, 2018
Publication date	Dec 20, 2022
Grant date	Dec 20, 2022

Abstract

A composition for cleaning a substrate is provided. According to an embodiment, the composition for cleaning the substrate includes an organic solvent having a Hansen solubility parameter of 5 or more to 12 or less for polystyrene latex to the substrate.

First claim

What is claimed is:

1. A method of processing a substrate, the method comprising:
rotating the substrate;
applying a cleaning composition to the substrate while the substrate is rotated, the cleaning composition including an organic solvent having a Hansen solubility parameter for polystyrene latex between 5 and 12; and
supplying a processing fluid comprising a mixture of the cleaning composition and a supercritical fluid to the substrate to which the cleaning composition was applied to process the substrate,
wherein the cleaning composition is provided by dissolving an etching compound comprising fluorine in the organic solvent, and
wherein the cleaning composition further includes a binder comprising a compound including phosphorus.

2. The method of claim 1 , wherein the organic solvent includes one of n-butyl acetate, diethyl malonate, isopropyl acetate, or a combination thereof.

3. The method of claim 1 , wherein the organic solvent has a surface tension of 30 dyn/cm or less.

4. The method of claim 1 , wherein the binder includes trimethyl phosphate.

5. The method of claim 1 , wherein the cleaning composition is provided in an anhydrous composition containing no water as a component.

6. The method of claim 1 , further comprising:
rinsing the substrate to which the cleaning composition is applied with the organic solvent before the supplying of the processing fluid.

7. The method of claim 1 , wherein the etching compound includes hydrogen fluoride.

8. The method of claim 1 , wherein the applying the cleaning composition to the substrate, while the substrate is rotated, is performed in a first process chamber, and
wherein the supplying of the processing fluid is performed in a second process chamber, which is spaced apart from the first process chamber.

Assignees

• Semes Co Ltd

Inventors

• Choi Hae-Won
• Choi Kihoon
• Lee Jaeseong
• Heo Chan Young
• Koriakin Anton
• Kim Do Heon
• Jeong Ji Soo

Classifications

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P70/80

  Cleaning only by supercritical fluids · CPC title

• C11D7/5022 Primary

  containing oxygen · CPC title

• B08B3/08

  the liquid having chemical or dissolving effect · CPC title

• C11D7/36 Primary

  containing phosphorus · CPC title