Electrostatic element having grooved exterior surface
US-10867772-B2 · Dec 15, 2020 · US
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Hermanson Eric patents
Hermanson Eric is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Hermanson Eric |
| Total patents | 7 |
| First publication | Mar 5, 2015 |
| Latest publication | Dec 15, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Electrostatic element having grooved exterior surface
US-2020020508-A1 · Jan 16, 2020 · US
RF clean system for electrostatic elements
US-10410844-B2 · Sep 10, 2019 · US
High throughput substrate handling endstation and sequence
US-10157763-B2 · Dec 18, 2018 · US
Rf clean system for electrostatic elements
US-2018166261-A1 · Jun 14, 2018 · US
Connector for process chamber electrostatic elements
US-9613778-B1 · Apr 4, 2017 · US
High throughput substrate handling endstation and sequence
US-2015063954-A1 · Mar 5, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Varian Semiconductor Equipment Ass Inc | 6 |
| Varian Semiconductor Equipment | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/3171 | 5 |
| H01J2237/057 | 5 |
| H01J2237/022 | 4 |
| H01J37/12 | 3 |
| H01J37/05 | 3 |