Methods for post-processing and for handling of mems chips
US-2026084957-A1 · Mar 26, 2026 · US
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Haacker Fabian patents
Haacker Fabian is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Haacker Fabian |
| Total patents | 13 |
| First publication | Nov 24, 2016 |
| Latest publication | Mar 26, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Method for producing a mems mirror array, and mems mirror array
US-2026015226-A1 · Jan 15, 2026 · US
Euv multi-mirror arrangement
US-2025258437-A1 · Aug 14, 2025 · US
Apparatus for stress-reduced mounting of mems-based micromirrors
US-2025206598-A1 · Jun 26, 2025 · US
Optical device, method for measuring an actual tilt of an optical surface of an optical element, and lithography system
US-2024426603-A1 · Dec 26, 2024 · US
Multi-mirror array
US-2024248408-A1 · Jul 25, 2024 · US
Method for illuminating an object field of a projection exposure system
US-10409167-B2 · Sep 10, 2019 · US
Mirror device
US-10101507-B2 · Oct 16, 2018 · US
Mirror array
US-9874819-B2 · Jan 23, 2018 · US
Optical component
US-9851555-B2 · Dec 26, 2017 · US
Recent patents
Latest publications not already listed above.
Mirror device
US-2017276842-A1 · Sep 28, 2017 · US
Method for illuminating an object field of a projection exposure system
US-2016342094-A1 · Nov 24, 2016 · US
Mirror array
US-2016342095-A1 · Nov 24, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 13 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/702 | 9 |
| G03F7/70075 | 8 |
| G03F7/70116 | 8 |
| G02B26/0833 | 7 |
| G02B5/09 | 4 |