Atomic layer deposition of superconducting transition metal nitrides for quantum circuits and detectors
US-2025361610-A1 · Nov 27, 2025 · US
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Greer Harold Frank patents
Greer Harold Frank is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Greer Harold Frank |
| Total patents | 14 |
| First publication | Dec 20, 2018 |
| Latest publication | Nov 27, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Atomic layer-based surface treatments for infrared detectors
US-12426387-B2 · Sep 23, 2025 · US
Quasi-atomic layer etching of silicon nitride enhanced by reduced wafer temperature
US-2025273475-A1 · Aug 28, 2025 · US
Atomic layer etching for smoothing of arbitrary surfaces
US-2025125153-A1 · Apr 17, 2025 · US
Atomic layer etching of mgo-doped lithium niobate using sequential exposures of h2 and sf6/argon plasmas
US-2025120318-A1 · Apr 10, 2025 · US
Atomic layer etching for smoothing of arbitrary surfaces
US-12217968-B2 · Feb 4, 2025 · US
Novel coating method of complex 3d structures using low pressure chemical vapor deposition
US-2024102167-A1 · Mar 28, 2024 · US
Epitaxial substrate surfaces for semiconductor material growth and improved smooth semiconductor surfaces for higher channel mobility through the formation and removal of reactive layers
US-2024021428-A1 · Jan 18, 2024 · US
Methods and systems for atomic layer etching and atomic layer deposition
US-11864472-B2 · Jan 2, 2024 · US
Atomic Layer-Based Surface Treatments for Infrared Detectors
US-2023129191-A1 · Apr 27, 2023 · US
Recent patents
Latest publications not already listed above.
Methods and systems for atomic layer etching and atomic layer deposition
US-2022013706-A1 · Jan 13, 2022 · US
Atomic layer etching for smoothing of arbitrary surfaces
US-2021313185-A1 · Oct 7, 2021 · US
Microfabricated passively and/or actively cooled apparatus for highly efficient, low cost atmospheric water generators
US-10876276-B2 · Dec 29, 2020 · US
Microfabricated passively and/or actively cooled apparatus for highly efficient, low cost atmospheric water generators
US-2018363277-A1 · Dec 20, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| California Inst Of Techn | 14 |
| Pwil Inc | 2 |
| Univ Southern California | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P50/283 | 6 |
| H10P50/242 | 6 |
| H10P95/064 | 5 |
| H10P95/04 | 3 |
| H10P72/0422 | 3 |