Method for producing an optical imaging system for a microlithography apparatus
US-2026072364-A1 · Mar 12, 2026 · US
This page is not indexed by search engines while we improve data quality.
Fritzsche Steffen patents
Fritzsche Steffen is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Fritzsche Steffen |
| Total patents | 15 |
| First publication | Apr 16, 2015 |
| Latest publication | Mar 12, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Optical system
US-12346033-B2 · Jul 1, 2025 · US
Method for mounting an optical system
US-2022283503-A1 · Sep 8, 2022 · US
Optical system
US-2022236652-A1 · Jul 28, 2022 · US
Optical arrangement, in particular lithography system, with a transport lock
US-10761436-B2 · Sep 1, 2020 · US
Optical system
US-2019354025-A1 · Nov 21, 2019 · US
Optical arrangement, in particular lithography system, with a transport lock
US-2019339625-A1 · Nov 7, 2019 · US
Optical system
US-10386733-B2 · Aug 20, 2019 · US
Method for producing a lens for a lithography apparatus, and measurement system
US-10345547-B2 · Jul 9, 2019 · US
Optical system
US-2018101105-A1 · Apr 12, 2018 · US
Recent patents
Latest publications not already listed above.
Optical assembly
US-9939730-B2 · Apr 10, 2018 · US
Method for producing a lens for a lithography apparatus, and measurement system
US-2018074278-A1 · Mar 15, 2018 · US
Optical element
US-9658542-B2 · May 23, 2017 · US
Optical assembly
US-2016091798-A1 · Mar 31, 2016 · US
Optical element
US-2015103326-A1 · Apr 16, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 15 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70258 | 11 |
| G03F7/70825 | 10 |
| G03F7/7085 | 10 |
| G03F7/70833 | 6 |
| G02B7/1828 | 5 |