Optical assembly

Patent metadata

Field	Value
Publication number	US-9939730-B2
Application number	US-201514962149-A
Country	US
Kind code	B2
Filing date	Dec 8, 2015
Priority date	Jul 17, 2013
Publication date	Apr 10, 2018
Grant date	Apr 10, 2018

Abstract

An optical assembly, in particular for a lithography system for imaging lithographic micro- or nanostructures, includes at least two optical elements arranged successively in a beam path of the optical assembly, an acquisition device designed to acquire radiation signals from marking elements on or at the at least two optical elements, and a control device coupled to the acquisition device and which is designed to determine the plurality of properties of the optically active surface of the at least two optical elements as a function of the information contained in the radiation signals originating from the marking elements. The disclosure also relates to a method for operating the optical assembly.

First claim

What is claimed is:

1. An optical assembly, comprising:
first and second optical elements arranged successively in a beam path of the optical assembly;
an acquisition device configured so that, during use of the optical assembly, the acquisition device acquires radiation signals from marking elements on or at the first and second optical elements, the marking elements being outside optically active regions of the first and second optical elements, the acquisition device being outside the beam path between the first and second optical elements, the radiation signals containing information about a plurality of different properties of the optically active surfaces of the first and second optical elements; and
a control device coupled to the acquisition device, the control device configured to determine the plurality of properties of the optically active surfaces of the first and second optical elements based on the information contained in the radiation signals originating from the marking elements.

2. The optical assembly of claim 1 , wherein the radiation signals comprise information selected from the group consisting of spatially resolved optical information of the first and second optical elements, spatially resolved temperature information of the first and second optical elements, and position information of the first and second optical elements.

3. The optical assembly of claim 1 , further comprising a holding apparatus at least partly enclosing the beam path, wherein the acquisition device is fitted to the holding apparatus outside the beam path.

4. The optical assembly of claim 3 , wherein the acquisition device comprises a plurality of sub-acquisition devices fitted to the holding apparatus outside the beam path.

5. The optical assembly of claim 3 , wherein the holding apparatus is configured to have cooled regions.

6. The optical assembly of claim 4 , wherein the holding apparatus has openings through which the sub-acquisition devices acquire radiation signals from the respective optical element and/or from marking elements on the respective optical element.

7. The optical assembly of claim 4 , wherein the sub-acquisition devices are outside the beam paths between the optically active regions of the first and second optical elements.

8. The optical assembly of claim 4 , wherein the sub-acquisition devices are fitted to at least one cleaning head.

9. The optical assembly of claim 8 , wherein the at least one cleaning head comprises at least one hydrogen cleaning head.

10. The optical assembly of claim 1 , wherein the acquisition device comprises at least one member selected from the group consisting of a camera, an optical waveguide configured to acquire and/or forward the radiation signals.

11. The optical assembly of claim 1 , wherein the acquisition device is designed to acquire radiation signals in the infrared range.

12. The optical assembly of claim 1 , wherein each of the first and second optical elements have at least one marking element, wherein the marking elements are configured to emit the radiation signals.

13. The optical assembly of claim 1 , wherein each of the marking elements comprises a structure selected from the group consisting of a diffractive structure, a scattering structure, and a reflective structure.

14. The optical assembly of claim 1 , wherein the acquisition device comprises a light source configured to illuminate the marking elements, and the acquisition device is configured to receive a radiation signal emerging from the marking elements.

15. The optical assembly of claim 1 , wherein the control device is coupled to the marking elements.

16. The optical assembly of claim 1 , wherein the acquisition device comprises at least two sub-acquisition devices with a light source, wherein the radiation signals emerging from the light sources cross one another and respectively irradiate marking elements of an optical element.

17. The optical assembly of claim 1 , wherein the first optical element comprises at least two marking elements.

18. The optical assembly of claim 17 , wherein the at least two marking elements are configured to produce different wave shifts of the incident light.

19. The optical assembly of claim 17 , wherein the at least two marking elements are configured so that the radiation signals output by the at least two marking elements interfere with each other.

20. The optical assembly of claim 19 , wherein:
the at least two marking elements comprise a jointly used scattering structure and a jointly used diffractive structure;
each of the at least two marking elements comprises an individually used diffractive structure;
the optical assembly is configured so that radiation signals are transferred from the jointly used scattering structure to the jointly used diffractive structure;
the jointly used diffractive structure is configured to transfer the radiation signals in each case to one of the individually used diffractive structures.

21. The optical assembly of claim 20 , wherein the optical assembly is configured so that, during use of the optical assembly, the jointly used scattering structure is irradiated by a light source.

22. The optical assembly of claim 1 , wherein each of the marking elements comprises a scattering structure and a diffractive structure, the scattering structure is on an underside of the respective optical element, the diffractive structure is on that side of the optically used region of the optical element which is situated opposite the underside, and the optical assembly is configured so that radiation signals are transferred from the scattering structure to the diffractive structure through the optical element.

23. The optical assembly of claim 1 , wherein a marking element has a scattering structure and a stop, the optical assembly is configured so that radiation signals are directed through the scattering structure and the stop onto a coating-free region of the respective optical element.

24. The optical assembly of claim 22 , wherein the diffractive structure is in a mirror surface of the optical element.

25. The optical assembly of claim 24 , wherein the mirror surface is locally curved to define a lens.

26. The optical assembly of claim 1 , wherein the acquisition device is configured to acquire radiation signals having a wavelength of between 193 nm and 1450 nm.

27. The optical assembly of claim 1 , wherein the marking element comprises a light source.

28. The optical assembly of claim 1 , wherein the marking elements are configured to be switched on and/or off.

29. The optical assembly of claim 1 , wherein the acquisition device is arranged in the beam path to the first optical element, or the acquisition device is arranged in the beam path from the second optical element.

30. A method, comprising:
providing the optical assembly of claim 1 ;
acquiring radiation signals from the marking elements, the radiation signals comprising information about a plurality of properties of an optically active surface of the at least two optical elements; and
determining the plurality of properties of the optically active surface of the first and second optical elements based on the information contained in the radiation signals.

31. The method of claim 30 , further comprising positioning the first and second optical elements, whe

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Pauls Walter
• Wagner Hendrik
• Ahles Florian
• Wald Christian
• Fritzsche Steffen
• Wabra Norbert
• Bittner Boris
• Schneider Sonja
• Schoemer Ricarda

Classifications

• G03F7/7085

  Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load · CPC title

• G03F7/70258 Primary

  Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system · CPC title

• G03F7/70058 Primary

  Mask illumination systems · CPC title