Optical system

Patent metadata

Field	Value
Publication number	US-10386733-B2
Application number	US-201715835922-A
Country	US
Kind code	B2
Filing date	Dec 8, 2017
Priority date	Jun 18, 2015
Publication date	Aug 20, 2019
Grant date	Aug 20, 2019

Abstract

The disclosure provides an optical system, having a first optical control loop, which is set up to regulate a position and/or spatial orientation of a first optical element relative to a first module sensor frame, and a first module control loop, which is set up to regulate a position and/or spatial orientation of the first module sensor frame relative to a base sensor frame. Related components and methods are also provided.

First claim

What is claimed is:

1. An optical system, comprising:
optical elements;
actuators;
a holding frame holding the optical elements so that the optical elements are positionable and/or spatially orientable via the actuators;
a sensor frame mechanically decoupled from the holding frame;
sensors configured to capture a position and/or spatial orientation of a respective optical element relative to the sensor frame; and
an interferometer comprising a measurement section along which electromagnetic radiation is sent and which extends via two reflection points on the sensor frame,
wherein:
the holding frame encloses a volume;
the sensor frame is arranged partially or entirely within the volume; and
the interferometer is configured to capture a change in position, a change in spatial orientation, and/or a deformation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

2. The optical system of claim 1 , wherein the sensor frame comprises a plurality of arms projecting from a base body, and each of at least two of the arms comprises one of the sensors.

3. The optical system of claim 2 , wherein the base body and the projecting arms are configured in one part or in one piece.

4. An inspection system, comprising:
an optical system according to claim 1 ,
wherein the inspection system is configured to inspect a photomask.

5. The inspection system of claim 4 , wherein the interferometer is configured to capture a change in position of the sensor frame or parts thereof with respect to a reference outside the holding frame.

6. The inspection system of claim 4 , wherein the interferometer is configured to capture a change in spatial orientation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

7. The inspection system of claim 4 , wherein the interferometer is configured to capture a deformation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

8. A projection system, comprising:
an optical system according to claim 1 ,
wherein the projection system is a lithography projection system.

9. The projection system of claim 8 , wherein the interferometer is configured to capture a change in position of the sensor frame or parts thereof with respect to a reference outside the holding frame.

10. The projection system of claim 8 , wherein the interferometer is configured to capture a change in spatial orientation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

11. The projection system of claim 8 , wherein the interferometer is configured to capture a deformation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

12. An apparatus, comprising:
an optical system according to claim 1 ,
wherein the apparatus is a lithography apparatus.

13. The apparatus of claim 12 , wherein the interferometer is configured to capture a change in position of the sensor frame or parts thereof with respect to a reference outside the holding frame.

14. The apparatus of claim 12 , wherein the interferometer is configured to capture a change in spatial orientation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

15. The apparatus of claim 12 , wherein the interferometer is configured to capture a deformation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

16. The optical system of claim 1 , wherein the interferometer is configured to capture a change in position of the sensor frame or parts thereof with respect to a reference outside the holding frame.

17. The optical system of claim 16 , wherein the interferometer is configured to capture a change in spatial orientation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

18. The optical system of claim 17 , wherein the interferometer is configured to capture a deformation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

19. The optical system of claim 1 , wherein the interferometer is configured to capture a change in spatial orientation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

20. The optical system of claim 19 , wherein the interferometer is configured to capture a deformation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

21. The optical system of claim 1 , wherein the interferometer is configured to capture a deformation of the sensor frame or parts thereof with respect to a reference outside the holding frame.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Freimann Rolf
• Baier Juergen
• Fritzsche Steffen

Classifications

• G03F7/70258

  Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system · CPC title

• G02B7/1828 Primary

  using magnetic means · CPC title

• G03F7/70825 Primary

  Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707) · CPC title

• G03F7/70833 Primary

  Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground · CPC title

• G03F7/70316

  Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements · CPC title