Apparatus for and method of generating multiple laser beams
US-12586978-B2 · Mar 24, 2026 · US
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Duffey Thomas Patrick patents
Duffey Thomas Patrick is listed as an inventor on 36 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Duffey Thomas Patrick |
| Total patents | 36 |
| First publication | Jan 18, 2018 |
| Latest publication | Mar 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Control system for a plurality of deep ultraviolet optical oscillators
US-12374853-B2 · Jul 29, 2025 · US
Radiation source testing
US-12169363-B2 · Dec 17, 2024 · US
Method of and apparatus for extending electrode life in a laser chamber
US-11777271-B2 · Oct 3, 2023 · US
Spectral feature selection and pulse timing control of a pulsed light beam
US-11768438-B2 · Sep 26, 2023 · US
Reducing speckle in an excimer light source
US-11686951-B2 · Jun 27, 2023 · US
Spectral feature selection and pulse timing control of a pulsed light beam
US-2023040812-A1 · Feb 9, 2023 · US
Dual pulsed power system with independent voltage and timing control and reduced power consumption
US-2023017337-A1 · Jan 19, 2023 · US
Radiation source testing
US-2022404717-A1 · Dec 22, 2022 · US
Spectral feature selection and pulse timing control of a pulsed light beam
US-11526083-B2 · Dec 13, 2022 · US
Recent patents
Latest publications not already listed above.
Control system for a plurality of deep ultraviolet optical oscillators
US-2022255286-A1 · Aug 11, 2022 · US
Apparatus for and method of generating multiple laser beams
US-2022255288-A1 · Aug 11, 2022 · US
Reducing speckle in an excimer light source
US-2021239998-A1 · Aug 5, 2021 · US
Reducing speckle in an excimer light source
US-11054665-B2 · Jul 6, 2021 · US
Method of and apparatus for extending electrode life in a laser chamber
US-2021111529-A1 · Apr 15, 2021 · US
Spectral feature selection and pulse timing control of a pulsed light beam
US-2021018846-A1 · Jan 21, 2021 · US
Apparatus for and method of sensing fluorine concentration
US-10852227-B2 · Dec 1, 2020 · US
Lithography optics adjustment and monitoring
US-10845711-B2 · Nov 24, 2020 · US
Reducing speckle in an excimer light source
US-2019324286-A1 · Oct 24, 2019 · US
Reducing speckle in an excimer light source
US-10451890-B2 · Oct 22, 2019 · US
Lithography optics adjustment and monitoring
US-2019310558-A1 · Oct 10, 2019 · US
Lithography optics adjustment and monitoring
US-10345714-B2 · Jul 9, 2019 · US
Apparatus for and method of sensing fluorine concentration
US-2019170635-A1 · Jun 6, 2019 · US
Homogenization of light beam for spectral feature metrology
US-10288484-B2 · May 14, 2019 · US
Adjusting an amount of coherence of a light beam
US-10267687-B2 · Apr 23, 2019 · US
Apparatus for and method of sensing fluorine concentration
US-10228322-B2 · Mar 12, 2019 · US
Apparatus for and method of sensing fluorine concentration
US-2019017924-A1 · Jan 17, 2019 · US
Homogenization of light beam for spectral feature metrology
US-2018292264-A1 · Oct 11, 2018 · US
Erosion resistant electrodes for use in generating gas discharge laser
US-10074953-B2 · Sep 11, 2018 · US
Reducing speckle in an excimer light source
US-2018203248-A1 · Jul 19, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Cymer LLC | 36 |
| Asml Netherlands Bv | 6 |
| Luo Siqi | 1 |
| Ujazdowski Richard Carl | 1 |
| Gillespie Walter Dale | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01S3/225 | 23 |
| G03F7/70041 | 18 |
| G03F7/70025 | 16 |
| G03F7/7055 | 14 |
| G01J11/00 | 14 |