Erosion resistant electrodes for use in generating gas discharge laser

Patent metadata

Field	Value
Publication number	US-10074953-B2
Application number	US-201514872018-A
Country	US
Kind code	B2
Filing date	Sep 30, 2015
Priority date	Sep 30, 2015
Publication date	Sep 11, 2018
Grant date	Sep 11, 2018

Abstract

Anodes and cathodes for use in generating gas discharge laser light are disclosed. The improved anode has a transition portion that includes a substantially vertical sidewall to transition between the active portion and the end portion to reduce erosion-related issues. The improved cathode has thickened spine portions in enhanced erosion locations. The spine portions are thickened by removing material from the shoulder of the cathode stepped cross-section profile in those locations in order to improve the longevity of the cathode.

First claim

What is claimed is:

1. An elongated erodable electrode for use in generating gas discharge laser, said electrode having a base plane, said base plane parallel to an X-Y plane formed by an x-direction and a y-direction orthogonal to said x-direction, said electrode elongated along said x direction, comprising
an active portion spanning a first portion of said electrode along said x direction, said active portion having an active portion top surface, said active portion having a first thickness measured along a z direction orthogonal to both said x direction and said y direction, said active portion having a first stepped cross-section profile parallel to a Y-Z plane formed by said z direction and said y direction;
an end portion spanning a second portion of said electrode along said x direction, said end portion having an end portion top surface, said end portion having a second thickness measured along said z direction, wherein said second thickness is less than said first thickness; and
a transition structure, wherein said transition structure includes substantially vertical sidewall connecting said end portion top surface with said active portion top surface, said substantially vertical sidewall being substantially parallel to said z direction,
wherein said active portion comprises a non-tapered active portion and a tapered active portion, said non-tapered active portion having a first top surface that is part of said active portion top surface, said tapered active portion having a second top surface that is part of said active portion top surface, said first top surface coupled to said second top surface, said second top surface being sloped relative to said first top surface and coupled with said substantially vertical sidewall, said non-tapered active portion having a thickness that is greater than a thickness of said tapered active portion.

2. The electrode of claim 1 wherein said end portion has a second stepped cross-section profile parallel to said Y-Z plane.

3. The electrode of claim 1 wherein said substantially vertical sidewall is curved along a curve formed in a plane parallel to said end portion top surface.

4. The electrode of claim 3 wherein said curve is part of a circle.

5. An elongated erodable electrode for use in generating gas discharge laser, said electrode having a base plane, said base plane parallel to a X-Y plane formed by an X direction and a Y direction orthogonal to said X direction, said electrode elongated along said X direction, comprising
an active region spanning a first portion of said electrode along said x direction, said active region having an active region top surface, said active region having a first thickness measured along a Z direction orthogonal to both said X direction and said Y direction, said active region having a first stepped cross-section profile parallel to a Y-Z plane formed by said Z direction and said direction;
an end region spanning a second portion of said electrode along said X direction, said end region having an end region top surface, said end region having a second thickness measured along said Z direction, said second thickness is less than said first thickness, said end region having a second stepped cross-section profile parallel to said plane formed by said Z direction and said Y direction;
a transition region between said active region and said end region;
wherein a shoulder of said second stepped cross-section profile includes an indentation that renders a height of a step of said second stepped cross-section profile larger than a step of said first stepped cross-section profile,
and wherein said active region top surface is parallel to said base plane and wherein said end region top surface is sloped relative to said base plane.

6. The electrode of claim 5 wherein said electrode is configured for use as a cathode disposed opposite a grounded anode.

7. An elongated erodable electrode for use in generating gas discharge laser, said electrode having a base plane, said base plane parallel to a X-Y plane formed by an X direction and a Y direction orthogonal to said X direction, said electrode elongated along said X direction, comprising
an active region spanning a first portion of said electrode along said x direction, said active region having an active region top surface, said active region having a first thickness measured along a Z direction orthogonal to both said X direction and said Y direction, said active region having a first stepped cross-section profile parallel to a Y-Z plane formed by said Z direction and said Y direction,
wherein a shoulder of said first stepped cross-section profile at a first longitudinal position in said active region includes removed portion that renders a height of a step of said first stepped cross-section profile at said first longitudinal position greater than a step of said first stepped cross-section profile at a second longitudinal position in said active region, and
wherein a top surface of said step of said first stepped cross-section profile at said first longitudinal position does not protrude above a top surface of said step of said first stepped cross-section profile at said second longitudinal position;
an end region spanning a second portion of said electrode along said X direction, said end region having an end region top surface, said end region having a second thickness measured along said Z direction, said second thickness is less than said first thickness; and
a transition region between said active region and said end region, wherein said active region top surface is parallel to said base plane and wherein said end region top surface is sloped relative to said base plane.

8. The electrode of claim 7 wherein said electrode is configured for use as a cathode disposed opposite a grounded anode.

9. A laser apparatus, comprising:
an elongated erodable anode for use in generating gas discharge laser, said anode having an anode base plane, said anode base plane parallel to an X-Y plane formed by an x-direction and a y-direction orthogonal to said x-direction, said anode elongated along said x direction, said elongated erodable anode including at least
an anode active portion spanning a first portion of said anode along said x direction, said anode active portion having an anode active portion top surface, said anode active portion having a first anode thickness measured along a z direction orthogonal to both said x direction and said y direction, said anode active portion having a first anode stepped cross-section profile parallel to a Y-Z plane formed by said z direction and said y direction,
an anode end portion spanning a second portion of said anode along said x direction, said anode end portion having an anode end portion top surface, said anode end portion having a second anode thickness measured along said z direction, wherein said second anode thickness is less than said first anode thickness, and
an anode transition structure, wherein said anode transition structure includes substantially vertical anode sidewall connecting said anode end portion top surface with said anode active portion top surface, said substantially vertical anode sidewall being substantially parallel to said z direction,
wherein said anode active portion comprises a non-tapered anode active portion and a tapered anode active portion, said non-tapered anode active portion having a first anode top surface that is part of said anode active portion top surface, said tapered anode active portion having a second anode top surface that is part of said anode active portion top surface, said first anode top surface coupled to said second anode top surface, said second anode top surface being sloped relative to said first anode top surface an

Assignees

• Luo Siqi
• Ujazdowski Richard Carl
• Gillespie Walter Dale
• Duffey Thomas Patrick
• Cymer LLC

Inventors

• Luo Siqi
• Ujazdowski Richard Carl
• Gillespie Walter Dale
• Duffey Thomas Patrick

Classifications

• H01S3/0971

  transversely excited (H01S3/0975 takes precedence) · CPC title

• H01S3/0382

  Cathodes or particular adaptations thereof · CPC title

• H01S3/0385 Primary

  Shape · CPC title

• H01S3/097

  by gas discharge of a gas laser · CPC title

• H01S3/225

  comprising an excimer or exciplex · CPC title