Homogenization of light beam for spectral feature metrology

Patent metadata

Field	Value
Publication number	US-10288484-B2
Application number	US-201816004942-A
Country	US
Kind code	B2
Filing date	Jun 11, 2018
Priority date	Nov 29, 2016
Publication date	May 14, 2019
Grant date	May 14, 2019

Abstract

A metrology system is used for measuring a spectral feature of a pulsed light beam. The metrology system includes: a beam homogenizer in the path of the pulsed light beam, the beam homogenizer having an array of wavefront modification cells, with each cell having a surface area that matches a size of at least one of the spatial modes of the light beam; an optical frequency separation apparatus in the path of the pulsed light beam exiting the beam homogenizer, wherein the optical frequency separation apparatus is configured to interact with the pulsed light beam and to output a plurality of spatial components that correspond to the spectral components of the pulsed light beam; and at least one sensor that receives and senses the output spatial components.

First claim

What is claimed is:

1. A metrology system for measuring a spectral feature of a pulsed light beam, the metrology system comprising:
a beam homogenizer in the path of the pulsed light beam, the beam homogenizer including an array of wavefront modification cells, with each cell having a surface area that matches a size of at least one of the spatial modes of the light beam;
an etalon in the path of the pulsed light beam exiting the beam homogenizer, wherein the etalon is configured to interact with the pulsed light beam and to output a plurality of spatial components that correspond to the spectral components of the pulsed light beam; and
at least one sensor that receives and senses the output spatial components.

2. The metrology system of claim 1 , further comprising a control system connected to an output of the at least one sensor and configured to:
measure a property of the output spatial components from the etalon for one or more pulses;
analyze the measured property to calculate an estimate of the spectral feature of the pulsed light beam; and
determine whether the estimated spectral feature of the pulsed light beam is within an acceptable range of values of spectral features.

3. The metrology system of claim 2 , wherein the spectral feature is a bandwidth of the pulsed light beam.

4. The metrology system of claim 2 , further comprising a spectral feature selection system optically connected to the pulsed light beam, wherein:
the control system is in communication with the spectral feature selection system; and
if the control system determines that the estimated spectral feature of the pulsed light beam is outside the acceptable range, then the control system is configured to send an adjustment signal to the spectral feature selection system to modify the spectral feature of the pulsed light beam.

5. The metrology system of claim 1 , wherein a cell surface area matches a mode size of the light beam if the cell surface area is between 0.5 and 1.5 times the area of the spatial mode.

6. The metrology system of claim 1 , wherein a cell surface area matches a mode size of the light beam if the cell surface area is between 0.9 and 1.1 times the area of the spatial mode.

7. The metrology system of claim 1 , further comprising an optical diffuser in the path of the light beam, wherein the beam homogenizer receives the light beam that is output from the optical diffuser.

8. The metrology system of claim 7 , wherein the optical diffuser includes a microlens array.

9. The metrology system of claim 1 , further comprising a beam separation device in the path between a source that produces the light beam and a photolithography exposure apparatus, wherein the beam separation device:
directs a first percentage of the light beam toward the beam homogenizer, and
directs a second percentage of the light beam along the path toward the photolithography exposure apparatus.

10. The metrology system of claim 9 , further comprising an optical temporal pulse stretcher between the beam separation device and the beam homogenizer.

11. The metrology system of claim 10 , wherein the optical temporal pulse stretcher is a passive optical element.

12. The metrology system of claim 1 , wherein the beam homogenizer comprises:
at least two arrays, each array having a plurality of wavefront modification cells; and
a lens that receives the light beam output of the at least two arrays.

13. The metrology system of claim 12 , wherein the homogenized beam plane is at the focal plane of the lens.

14. The metrology system of claim 13 , further comprising a spinning diffuser at the homogenized beam plane.

15. The metrology system of claim 13 , wherein the lens has a focal length that is large enough so that the spacing between diffraction spikes of the output light beam from the at least two arrays is greater than an area of the at least one sensor that receives the output light beam from the beam homogenizer.

16. The metrology system of claim 12 , further comprising an actuator connected to one or more of the at least two arrays, and configured to adjust a distance between the at least two arrays.

17. The metrology system of claim 1 , wherein the beam homogenizer cell array is made of calcium fluoride, fused silica, aluminum fluoride, encapsulated magnesium fluoride, gadolinium fluoride, or sodium aluminum fluoride.

18. The metrology system of claim 1 , wherein the beam homogenizer cell array comprises an array of lenslets.

19. The metrology system of claim 1 , wherein the beam homogenizer cell array is a transmissive cell array.

20. The metrology system of claim 1 , wherein the light beam has a plurality of wavelengths, at least some being in the deep ultraviolet range.

21. The metrology system of claim 1 , wherein the size of the spatial mode of the light beam corresponds to a transverse area across the light beam in which all points within the transverse area have a fixed phase relationship.

22. The metrology system of claim 1 , wherein the beam homogenizer is in the path of a pulsed light beam output from a power amplifier of an optical source.

23. The metrology system of claim 1 , wherein the beam homogenizer is in the path of a pulsed seed light beam output from a master oscillator of an optical source.

Assignees

• Cymer LLC

Inventors

• Zhao Zhongquan
• King Brian Edward
• Duffey Thomas Patrick

Classifications

• G01J3/0205

  Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows · CPC title

• G01J1/0474

  Diffusers (cavities G01J2001/0481) · CPC title

• H01S3/005

  Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping (shaping laser beam for working metal or other materials B23K26/06; optical elements, systems or apparatus in general G02B) · CPC title

• G01J11/00

  Measuring the characteristics of individual optical pulses or of optical pulse trains · CPC title

• G01J1/0488

  with spectral filtering · CPC title