Apparatus for and method of sensing fluorine concentration

Patent metadata

Field	Value
Publication number	US-10852227-B2
Application number	US-201916266501-A
Country	US
Kind code	B2
Filing date	Feb 4, 2019
Priority date	Jul 13, 2017
Publication date	Dec 1, 2020
Grant date	Dec 1, 2020

Abstract

Disclosed is an apparatus for and method of measuring the concentration of F2 in the laser gas used in an excimer laser. Quartz Enhanced Photoacoustic Spectroscopy is used to obtain a direct measurement of F2 concentration quickly and using only a small sample volume.

First claim

The invention claimed is:

1. Apparatus comprising:
a laser chamber adapted to retain a laser gas containing fluorine;
a gas cell in selective fluid communication with the laser chamber for retaining a sample of the laser gas;
a radiation source arranged to irradiate at least a portion of the gas sample with radiation modulated at a reference frequency to produce acoustic waves in the gas sample;
a transducer located in the gas cell and having a resonant frequency substantially the same as the reference frequency and subjected to the acoustic waves in such a manner as to cause at least a portion of the transducer to vibrate for generating an electrical signal indicative of a frequency at which the transducer vibrates; and
a circuit arranged to receive the electrical signal and for generating an output signal indicative of a magnitude of a frequency component of the electrical signal at the reference frequency;
a preamplification circuit arranged to receive the electrical signal to produce an amplified electrical signal;
a lock-in amplifier arranged to receive the amplified electrical signal and for generating an output signal indicative of a magnitude of a frequency component of the electrical signal at the reference frequency;
a laser controller arranged to receive the output signal and adapted to determine, based at least in part on the output signal, a concentration of F2 in the sample gas and to generate an indication of a concentration of F2 in the sample gas; and
a gas supply system responsively connected to the laser controller and arranged to receive the indication and adapted to supply gas containing F2 to the laser chamber based at least in part on the indication from the laser controller.

2. Apparatus as claimed in claim 1 wherein the radiation source is an externally modulated continuous wave laser.

3. Apparatus as claimed in claim 1 wherein the radiation source comprises a continuous wave laser having a wavelength between about 360 nm and about 397 nm.

4. Apparatus as claimed in claim 1 wherein the radiation source comprises an LED.

5. Apparatus as claimed in claim 1 further comprising an acoustic resonator located in the gas cell and acoustically coupled to the transducer arranged to amplify the acoustic waves.

6. Apparatus comprising:
a laser chamber adapted to retain a laser gas containing fluorine;
a gas cell in selective fluid communication with the laser chamber for retaining a sample of the laser gas;
a frequency generator for producing a frequency signal having a reference frequency;
a radiation source arranged to receive the frequency signal and to irradiate at least a portion of the gas sample with radiation modulated at the reference frequency to produce acoustic waves in the gas sample;
an acoustic resonator located in the gas cell and arranged to amplify the acoustic waves;
a piezoelectric quartz tuning fork located in the gas cell and having a resonant frequency substantially the same as the reference frequency and subjected to the acoustic waves in such a manner as to cause at least a portion of the piezoelectric quartz tuning fork to vibrate for generating an electrical signal indicative of a frequency at which the piezoelectric quartz tuning fork vibrates;
a preamplification circuit arranged to receive the electrical signal to produce an amplified electrical signal;
a lock-in amplifier arranged to receive the amplified electrical signal and for generating an output signal indicative of a magnitude of a frequency component of the electrical signal at the reference frequency;
a laser controller arranged to receive the output signal and adapted to determine, based at least in part on the output signal, a concentration of F2 in the sample gas and to generate an indication of a concentration of F2 in the sample gas; and
a gas supply system responsively connected to the laser controller and arranged to receive the indication and adapted to supply gas containing F2 to the laser chamber based at least in part on the indication from the laser controller.

7. Apparatus comprising:
a laser chamber adapted to retain a laser gas containing fluorine;
a gas cell in selective fluid communication with the laser chamber for retaining a sample of the laser gas;
a frequency generator for producing a frequency signal having a reference frequency;
a radiation source arranged to receive the frequency signal and to irradiate at least a portion of the gas sample with radiation modulated at the reference frequency to produce acoustic waves in the gas sample;
an acoustic resonator located in the gas cell and arranged to amplify the acoustic waves;
a piezoelectric quartz tuning fork located in the gas cell and having a resonant frequency substantially the same as the reference frequency and subjected to the acoustic waves in such a manner as to cause at least a portion of the piezoelectric quartz tuning fork to vibrate for generating an electrical signal indicative of a frequency at which the piezoelectric quartz tuning fork vibrates;
a circuit arranged to receive the electrical signal and for generating an output signal indicative of a magnitude of a frequency component of the electrical signal at the reference frequency;
a preamplification circuit arranged to receive the electrical signal to produce an amplified electrical signal;
a lock-in amplifier arranged to receive the amplified electrical signal and for generating an output signal indicative of a magnitude of a frequency component of the electrical signal at the reference frequency;
a laser controller arranged to receive the output signal and adapted to determine, based at least in part on the output signal, a concentration of F2 in the sample gas and to generate an indication of a concentration of F2 in the sample gas; and
a gas supply system responsively connected to the laser controller and arranged to receive the indication and adapted to supply gas containing F2 to the laser chamber based at least in part on the indication from the laser controller.

8. A method comprising the steps of:
adding a sample of laser gas from a laser chamber to a gas cell;
irradiating at least a portion of the gas sample with radiation modulated at a reference frequency to produce acoustic waves in the gas sample, the acoustic waves inducing vibrations in a transducer located in the gas cell and having a resonant frequency substantially the same as the reference frequency, the transducer generating an electrical signal indicative of the vibrations;
using a preamplification circuit arranged to receive the electrical signal to produce an amplified electrical signal;
using a lock-in amplifier arranged to receive the amplified electrical signal and for generating an output signal indicative of a magnitude of a frequency component of the electrical signal at the reference frequency;
determining based at least in part on the output signal a concentration of F2 in the sample of laser gas and generating an indication of the concentration of F2 in the sample; and
supplying gas containing F2 to the laser chamber based at least in part on the indication.

Assignees

• Cymer LLC

Inventors

• Duffey Thomas Patrick

Classifications

• G01N2291/0427

  Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever · CPC title

• G01N2021/1708

  with piezotransducers · CPC title

• G01N2021/1704

  in gases · CPC title

• G01N29/2425

  optoacoustic fluid cells therefor · CPC title

• G01N21/3151

  using two sources of radiation of different wavelengths (G01N21/33 - G01N21/39 take precedence) · CPC title