Measurements of semiconductor structures based on spectral differences at different process steps
US-12532710-B2 · Jan 20, 2026 · US
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Di ming patents
Di ming is listed as an inventor on 19 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Di ming |
| Total patents | 19 |
| First publication | Jan 1, 2015 |
| Latest publication | Jan 20, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Measurement Condition Dependent, Multi-Dimensional Model Of Optical Dispersion Of Semiconductor Structures
US-2025349623-A1 · Nov 13, 2025 · US
Combination of multiwavelength raman and spectroscopic ellipsometry to measure a film stack
US-2024418633-A1 · Dec 19, 2024 · US
Methods And Systems For Nanoscale Imaging Based On Second Harmonic Signal Generation And Through-Focus Scanning Optical Microscopy
US-2024353352-A1 · Oct 24, 2024 · US
Interface-based defect inspection using second harmonic generation
US-2024221149-A1 · Jul 4, 2024 · US
Measurements Of Semiconductor Structures Based On Spectral Differences At Different Process Steps
US-2024186191-A1 · Jun 6, 2024 · US
Interface-based thin film metrology using second harmonic generation
US-2024176206-A1 · May 30, 2024 · US
Methods And Systems For Systematic Error Compensation Across A Fleet Of Metrology Systems Based On A Trained Error Evaluation Model
US-2024053280-A1 · Feb 15, 2024 · US
Bandgap measurements of patterned film stacks using spectroscopic metrology
US-11796390-B2 · Oct 24, 2023 · US
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic Metrology
US-2022349752-A1 · Nov 3, 2022 · US
Recent patents
Latest publications not already listed above.
Bandgap measurements of patterned film stacks using spectroscopic metrology
US-11378451-B2 · Jul 5, 2022 · US
Dispersion model for band gap tracking
US-10770362-B1 · Sep 8, 2020 · US
Dispersion model for band gap tracking
US-10410935-B1 · Sep 10, 2019 · US
Methods of bandgap analysis and modeling for high k metal gate
US-2019242938-A1 · Aug 8, 2019 · US
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic Metrology
US-2019041266-A1 · Feb 7, 2019 · US
Calculated electrical performance metrics for process monitoring and yield management
US-10079183-B2 · Sep 18, 2018 · US
Dispersion model for band gap tracking
US-9595481-B1 · Mar 14, 2017 · US
Measurement of composition for thin films
US-9442063-B2 · Sep 13, 2016 · US
Calculated Electrical Performance Metrics For Process Monitoring And Yield Management
US-2015006097-A1 · Jan 1, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Corp | 12 |
| Kla Tencor Corp | 7 |
| Di ming | 1 |
| Kaack Torsten | 1 |
| Zhao Qiang | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01N21/8422 | 13 |
| H10P74/203 | 10 |
| G01N21/211 | 9 |
| H01L22/12 | 9 |
| G01N21/9501 | 8 |