MEMS coriolis gas flow controller
US-11662237-B2 · May 30, 2023 · US
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Daugherty John E patents
Daugherty John E is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Daugherty John E |
| Total patents | 12 |
| First publication | Apr 19, 2016 |
| Latest publication | May 30, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Wafer transport assembly with integrated buffers
US-11393705-B2 · Jul 19, 2022 · US
Pin-lifter test substrate
US-2022013388-A1 · Jan 13, 2022 · US
Quartz component with protective coating
US-2021343510-A1 · Nov 4, 2021 · US
Quartz component with protective coating
US-11087961-B2 · Aug 10, 2021 · US
Mems coriolis gas flow controller
US-2021140807-A1 · May 13, 2021 · US
Wafer transport assembly with integrated buffers
US-2021005485-A1 · Jan 7, 2021 · US
Monolithic gas distribution manifold and various construction techniques and use cases therefor
US-10557197-B2 · Feb 11, 2020 · US
Quartz component with protective coating
US-2019272981-A1 · Sep 5, 2019 · US
Monolithic gas distribution manifold and various construction techniques and use cases therefor
US-2016108523-A1 · Apr 21, 2016 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 12 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/4404 | 5 |
| H01J37/3244 | 4 |
| B32B38/04 | 3 |
| H10P72/10 | 3 |
| H01J37/32798 | 3 |