Structure and method for E-beam in-chip overlay mark
US-9230867-B2 · Jan 5, 2016 · US
This page is not indexed by search engines while we improve data quality.
Cheng Dong-Hsu patents
Cheng Dong-Hsu is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Cheng Dong-Hsu |
| Total patents | 5 |
| First publication | Feb 17, 2015 |
| Latest publication | Jan 5, 2016 |
Notable patents
Publications ranked by popularity score, then publication date.
System and Method for Lithography Exposure With Correction of Overlay Shift Induced By Mask Heating
US-2015316861-A1 · Nov 5, 2015 · US
Structure and method for E-beam writing
US-9136092-B2 · Sep 15, 2015 · US
System and method for lithography exposure with correction of overlay shift induced by mask heating
US-9081293-B2 · Jul 14, 2015 · US
Layout decomposition method
US-8959460-B1 · Feb 17, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg | 5 |
| Lu Chi-Ta | 1 |
| Jou Jia-Guei | 1 |
| Chen Yi-Hsien | 1 |
| Chen Peng-Ren | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/70 | 4 |
| G03F7/70633 | 3 |
| G03F7/70875 | 2 |
| G03F7/70783 | 2 |
| G03F7/00 | 2 |