Methods of manufacturing semiconductor device and extreme ultraviolet photolithography systems
US-2026099087-A1 · Apr 9, 2026 · US
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Chen Li-Jui patents
Chen Li-Jui is listed as an inventor on 577 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chen Li-Jui |
| Total patents | 577 |
| First publication | May 5, 2015 |
| Latest publication | Apr 9, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Semiconductor processing tool and methods of operation
US-2026095978-A1 · Apr 2, 2026 · US
Lithography contamination control
US-12591182-B2 · Mar 31, 2026 · US
Semiconductor processing tool and methods of operation
US-2026089826-A1 · Mar 26, 2026 · US
Euv radiation source apparatus for lithography
US-2026079405-A1 · Mar 19, 2026 · US
Methods of cleaning a lithography system
US-2026072363-A1 · Mar 12, 2026 · US
Lithography system and methods
US-12572080-B2 · Mar 10, 2026 · US
System and method for omnidirectional real time detection of photolithography characteristics
US-12560868-B2 · Feb 24, 2026 · US
EUV Lithography System With 3D Sensing And Tunning Modules
US-2026036911-A1 · Feb 5, 2026 · US
EUV lithography system with 3D sensing and tunning modules
US-12541152-B2 · Feb 3, 2026 · US
Recent patents
Latest publications not already listed above.
Lithography apparatus and method
US-2025348005-A1 · Nov 13, 2025 · US
Inspection system for extreme ultraviolet (euv) light source
US-2025321499-A1 · Oct 16, 2025 · US
Extreme ultraviolet lithography tool
US-2025321503-A1 · Oct 16, 2025 · US
Semiconductor processing tool and methods of operation
US-12422755-B2 · Sep 23, 2025 · US
Lithography system and methods
US-12405529-B2 · Sep 2, 2025 · US
Methods of cleaning a lithography system
US-12372887-B2 · Jul 29, 2025 · US
Lithography system and methods
US-12287572-B2 · Apr 29, 2025 · US
Method for performing lithography process, light source, and EUV lithography system
US-12235594-B2 · Feb 25, 2025 · US
Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit
US-12210296-B2 · Jan 28, 2025 · US
Apparatus and method for generating extreme ultraviolet radiation
US-12193136-B2 · Jan 7, 2025 · US
System and method for performing extreme ultraviolet photolithography processes
US-12174545-B2 · Dec 24, 2024 · US
Method and system for generating droplets for EUV photolithography processes
US-12167526-B2 · Dec 10, 2024 · US
EUV light source and apparatus for lithography
US-12167525-B2 · Dec 10, 2024 · US
Semiconductor processing tool and methods of operation
US-12164235-B2 · Dec 10, 2024 · US
Particle removal device and method
US-12158701-B2 · Dec 3, 2024 · US
Onsite cleaning system and method
US-2024383013-A1 · Nov 21, 2024 · US
Lithography thermal control
US-2024389215-A1 · Nov 21, 2024 · US
Semiconductor processing tool and methods of operation
US-2024385537-A1 · Nov 21, 2024 · US
Semiconductor processing tool and methods of operation
US-2024385540-A1 · Nov 21, 2024 · US
Apparatus and method for generating extreme ultraviolet radiation
US-2024381515-A1 · Nov 14, 2024 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 572 |
| Taiwan Semiconductor Mfg | 9 |
| Univ Nat Tsing Hua | 3 |
| Chen Li-Jui | 2 |
| Chen Yu Chih | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70033 | 386 |
| H05G2/008 | 228 |
| G03F7/70916 | 180 |
| G03F7/2004 | 163 |
| H05G2/0094 | 138 |