Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
US-2025273463-A1 · Aug 28, 2025 · US
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Blomberg Tom patents
Blomberg Tom is listed as an inventor on 38 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Blomberg Tom |
| Total patents | 38 |
| First publication | Jan 22, 2015 |
| Latest publication | Aug 28, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
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Substrate processing apparatus and method
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Silicon oxide deposition method
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Silicon oxide deposition method
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Nanolaminate coating, related coated items and uses, method for improving resistance of a substrate to corrosion in essentially saline environments, medical device
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Recent patents
Latest publications not already listed above.
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Precursor container
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Semiconductor processing system with gas line for transporting excited species and related methods
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Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
US-2023260784-A1 · Aug 17, 2023 · US
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
US-11658030-B2 · May 23, 2023 · US
Precursor container
US-2023076675-A1 · Mar 9, 2023 · US
Substrate processing apparatus and method
US-2022356577-A1 · Nov 10, 2022 · US
Substrate processing apparatus and method
US-2022356575-A1 · Nov 10, 2022 · US
Silicon oxide deposition method
US-2022084817-A1 · Mar 17, 2022 · US
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Reactor, system including the reactor, and methods of manufacturing and using same
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Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods
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Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods
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Coating for joint implants
US-2020306410-A1 · Oct 1, 2020 · US
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
US-2020118817-A1 · Apr 16, 2020 · US
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
US-10529563-B2 · Jan 7, 2020 · US
Reactor, system including the reactor, and methods of manufacturing and using same
US-2019287769-A1 · Sep 19, 2019 · US
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
US-2018286675-A1 · Oct 4, 2018 · US
Silane and borane treatments for titanium carbide films
US-2017154778-A1 · Jun 1, 2017 · US
Silane and borane treatments for titanium carbide films
US-9583348-B2 · Feb 28, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asm Ip Holding Bv | 24 |
| Picosun Oy | 14 |
| Asm Ip Holdings B V | 1 |
| Matero Raija | 1 |
| Blomberg Tom | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/6339 | 19 |
| H01L21/0228 | 15 |
| H10P14/43 | 12 |
| C23C16/45544 | 11 |
| C23C16/45523 | 10 |