Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures

Patent metadata

Field	Value
Publication number	US-12354872-B2
Application number	US-202318140926-A
Country	US
Kind code	B2
Filing date	Apr 28, 2023
Priority date	Mar 29, 2017
Publication date	Jul 8, 2025
Grant date	Jul 8, 2025

Abstract

Methods for forming a doped metal oxide film on a substrate by cyclical deposition are provided. In some embodiments, methods may include contacting the substrate with a first reactant comprising a metal halide source, contacting the substrate with a second reactant comprising a hydrogenated source and contacting the substrate with a third reactant comprising an oxide source. In some embodiments, related semiconductor device structures may include a doped metal oxide film formed by cyclical deposition processes.

First claim

What is claimed is:

1. A method for forming a doped metal oxide film on a substrate, comprising:
contacting the substrate with a first reactant comprising a metal halide source;
contacting the substrate with a second reactant comprising a hydrogenated source, wherein the hydrogenated source is a dopant precursor for the doped metal oxide film; and
contacting the substrate with a third reactant comprising an oxide source,
wherein the doped metal oxide film comprises a structure depending on an order of the contacting the substrate with the first reactant, the contacting the substrate with the second reactant, and the contacting the substrate with the third reactant,
wherein the metal halide source comprises at least one transition metal selected from the group consisting of scandium (Sc), yttrium (Y), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W), manganese (Mn), technetium (Tc), rhenium (Re), iron (Fe), ruthenium (Ru), osmium (Os), cobalt (Co), rhodium (Rh), iridium (Ir), nickel (Ni), palladium (Pd), platinum (Pt), copper (Cu), silver (Ag), gold (Au), zinc (Zn), cadmium (Cd), and mercury (Hg), and
wherein the structure of the doped metal oxide film comprises a substantially amorphous structure in response to the contacting the substrate with the third reactant occurring after the contacting the substrate with the first reactant and before the contacting the substrate with the second reactant.

2. The method of claim 1 , wherein the substrate is heated to a temperature between about 120° C. and about 200° C.

3. The method of claim 1 , wherein the doped metal oxide film comprises between 2 atomic percent and 15 atomic percent dopant.

4. The method of claim 1 , wherein the hydrogenated source comprises a hydrogenated silicon source, which comprises at least one of silane (SiH 4 ), disilane (Si 2 H 6 ), trisilane (Si 3 H 8 ), or tetrasilane (Si 4 H 10 ).

5. The method of claim 1 , wherein the oxide source comprises at least one of ozone (O 3 ), an oxygen (O) radical, atomic oxygen (O), molecular oxygen (O 2 ), an oxygen plasma, or hydrogen peroxide (H 2 O 2 ).

6. The method of claim 1 , wherein the method comprises a deposition cycle, the deposition cycle comprising the contacting the substrate with the first reactant, the contacting the substrate with the third reactant, and the contacting the substrate with the second reactant, and wherein the deposition cycle is repeated two or more times.

7. The method of claim 1 , wherein the doped metal oxide film comprises greater than 15 atomic percent dopant.

8. The method of claim 1 , further comprising a step of purging the first reactant and first reaction byproducts.

9. The method of claim 1 , wherein the hydrogenated source is selected from the group consisting of a silane, having a formula Si x H (2x+2) or a cyclic silane, and a germane, having a formula Ge x H (2x+2) or a cyclic germane, wherein the hydrogenated source is a dopant precursor for the doped metal oxide film.

10. The method of claim 1 , further comprising repeating contacting the substrate with the first reactant subsequently followed by contacting the substrate with the third reactant.

11. The method of claim 1 , wherein the hydrogenated source is selected from the group consisting of cyclic silane and cyclic germane.

12. The method of claim 1 , wherein the second reactant comprises a reducing agent comprising hydrogen, and wherein a deposition temperature is less than 150° C.

13. The method of claim 12 , wherein the deposition temperature is less than 100° C.

14. The method of claim 1 , wherein the doped metal oxide film has an electrical resistivity greater than about 1000 mΩ-cm.

15. A method for forming a doped metal oxide film on a substrate, comprising:
contacting the substrate with a first reactant comprising a metal halide source;
contacting the substrate with a second reactant comprising a hydrogenated source, wherein the hydrogenated source is a dopant precursor for the doped metal oxide film, wherein the hydrogenated source comprises a hydrogenated germanium source, which comprises at least one of germane (GeH 4 ), digermane (Ge 2 H 6 ), trigermane (Ge 3 H 8 ), or tetragermane (Ge 4 H 10 ); and
contacting the substrate with a third reactant comprising an oxide source,
wherein the doped metal oxide film comprises a structure depending on an order of the contacting the substrate with the first reactant, the contacting the substrate with the second reactant, and the contacting the substrate with the third reactant,
wherein the metal halide source comprises at least one transition metal selected from the group consisting of scandium (Sc), yttrium (Y), titanium (Ti), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W), manganese (Mn), technetium (Tc), rhenium (Re), iron (Fe), ruthenium (Ru), osmium (Os), cobalt (Co), rhodium (Rh), iridium (Ir), nickel (Ni), palladium (Pd), platinum (Pt), copper (Cu), silver (Ag), gold (Au), zinc (Zn), cadmium (Cd), and mercury (Hg), and
wherein the structure of the doped metal oxide film comprises a substantially amorphous structure in response to the contacting the substrate with the third reactant occurring after the contacting the substrate with the first reactant and before the contacting the substrate with the second reactant.

16. The method of claim 15 , wherein the metal halide source comprises titanium tetrachloride (TiCl 4 ).

17. The method of claim 15 , wherein the metal halide source comprises titanium.

18. The method of claim 17 , wherein the hydrogenated source comprises a hydrogenated germanium source, which comprises at least one of digermane (Ge 2 H 6 ), trigermane (Ge 3 H 8 ), or tetragermane (Ge 4 H 10 ).

19. A method for forming a doped metal oxide film on a substrate, comprising:
contacting the substrate with a first reactant comprising a metal halide source, wherein the metal halide source comprises at least one transition metal selected from the group consisting of scandium (Sc), yttrium (Y), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W), manganese (Mn), technetium (Tc), rhenium (Re), iron (Fe), ruthenium (Ru), osmium (Os), cobalt (Co), rhodium (Rh), iridium (Ir), nickel (Ni), palladium (Pd), platinum (Pt), copper (Cu), silver (Ag), gold (Au), zinc (Zn), cadmium (Cd), and mercury (Hg);
contacting the substrate with a second reactant comprising a hydrogenated source, wherein the hydrogenated source is a dopant precursor for the doped metal oxide film; and
contacting the substrate with a third reactant comprising an oxide source,
wherein the doped metal oxide film comprises a structure depending on an order of the contacting the substrate with the first reactant, the contacting the substrate with the second reactant, and the contacting the substrate with the third reactant,
wherein the structure of the doped metal oxide film comprises a substantially amorphous structure in response to the contacting the substrate with the third reactant occurring after the contacting the substrate with the first reactant and before the contacting the substrate with the second reactant, and
wherein the second reactant comprises a reducing agent, and wherein the step of contacting the substrate with a second reactant forms a metallic film.

Assignees

• Asm Ip Holding Bv

Inventors

• Blomberg Tom
• Zhu chiyu

Classifications

• H10P14/3454

  Amorphous · CPC title

• H10P14/6339 Primary

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title

• H10P14/3438

  Doping during depositing · CPC title

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• H10D64/01342

  by deposition, e.g. evaporation, ALD or laser deposition (H10D64/01344 takes precedence) · CPC title