System and method for generating predictive images for wafer inspection using machine learning
US-12586170-B2 · Mar 24, 2026 · US
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Batistakis Chrysostomos patents
Batistakis Chrysostomos is listed as an inventor on 20 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Batistakis Chrysostomos |
| Total patents | 20 |
| First publication | Oct 8, 2020 |
| Latest publication | Mar 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus and method for determining three dimensional data based on an image of a patterned substrate
US-12567164-B2 · Mar 3, 2026 · US
System and method for generating predictive images for wafer inspection using machine learning
US-2025391010-A1 · Dec 25, 2025 · US
Methods of metrology and associated devices
US-2025199419-A1 · Jun 19, 2025 · US
Methods of metrology
US-2025147436-A1 · May 8, 2025 · US
Training a model to generate predictive data
US-2025103964-A1 · Mar 27, 2025 · US
Method for determining a stochastic metric relating to a lithographic process
US-2024369944-A1 · Nov 7, 2024 · US
Method for predicting resist deformation
US-11914942-B2 · Feb 27, 2024 · US
Data-driven prediction and identification of failure modes based on wafer-level analysis and root cause analysis for semiconductor processing
US-2024062356-A1 · Feb 22, 2024 · US
Apparatus and method for determining three dimensional data based on an image of a patterned substrate
US-2024054669-A1 · Feb 15, 2024 · US
Recent patents
Latest publications not already listed above.
Systems and methods for predicting layer deformation
US-11880640-B2 · Jan 23, 2024 · US
Machine learning based image generation of after-development or after-etch images
US-2024020961-A1 · Jan 18, 2024 · US
Method for predicting resist deformation
US-2023334217-A1 · Oct 19, 2023 · US
Method for predicting resist deformation
US-11709988-B2 · Jul 25, 2023 · US
Systems and methods for predicting layer deformation
US-2023222273-A1 · Jul 13, 2023 · US
Systems and methods for predicting layer deformation
US-11625520-B2 · Apr 11, 2023 · US
Method for predicting stochastic contributors
US-2023081821-A1 · Mar 16, 2023 · US
System and method for generating predictive images for wafer inspection using machine learning
US-2022375063-A1 · Nov 24, 2022 · US
Method for predicting resist deformation
US-2022075275-A1 · Mar 10, 2022 · US
Systems and methods for predicting layer deformation
US-2020320238-A1 · Oct 8, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 20 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/705 | 16 |
| G03F7/70625 | 9 |
| G03F7/70608 | 8 |
| G06F30/28 | 8 |
| G06N3/0464 | 8 |