Method for depositing a piezoelectric film containing AIN, and a piezoelectric film containing AIN
US-9994950-B2 · Jun 12, 2018 · US
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Barth Stephan patents
Barth Stephan is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Barth Stephan |
| Total patents | 2 |
| First publication | Dec 22, 2016 |
| Latest publication | Jun 12, 2018 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Fraunhofer Ges Forschung | 2 |
| Univ Dresden Tech | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C14/3464 | 2 |
| C23C14/0094 | 2 |
| C23C14/0036 | 2 |
| C23C14/0641 | 2 |
| C30B23/02 | 2 |