Support unit and apparatus for treating substrate
US-12456606-B2 · Oct 28, 2025 · US
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Bae Min Keun patents
Bae Min Keun is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Bae Min Keun |
| Total patents | 7 |
| First publication | Feb 10, 2022 |
| Latest publication | Oct 28, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate treating apparatus and substrate support unit
US-2025166977-A1 · May 22, 2025 · US
Substrate treating apparatus and substrate support unit
US-12249491-B2 · Mar 11, 2025 · US
Method of controlling plasma processing apparatus and plasma processing apparatus
US-2024055229-A1 · Feb 15, 2024 · US
Impedance matching circuit, power supply apparatus, and plasma processing equipment including same
US-2023197411-A1 · Jun 22, 2023 · US
Support unit and apparatus for treating substrate
US-2022199368-A1 · Jun 23, 2022 · US
Substrate treating apparatus and substrate support unit
US-2022044917-A1 · Feb 10, 2022 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semes Co Ltd | 7 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32715 | 6 |
| H01J37/32091 | 4 |
| H01J2237/3343 | 4 |
| H01J37/32568 | 4 |
| H01J37/32642 | 3 |