Support unit and substrate treating apparatus including the same
US-12472596-B2 · Nov 18, 2025 · US
This page is not indexed by search engines while we improve data quality.
Ahn Hee Man patents
Ahn Hee Man is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ahn Hee Man |
| Total patents | 17 |
| First publication | May 26, 2022 |
| Latest publication | Nov 18, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate treating apparatus and substrate treating method
US-2025210379-A1 · Jun 26, 2025 · US
Apparatus for smoothly exhausting the atmosphere in a processing space when rotating a substrate with liquid
US-12331399-B2 · Jun 17, 2025 · US
Substrate treating apparatus and substrate treating method
US-2025096007-A1 · Mar 20, 2025 · US
Substrate processing method, manufacturing method, and substrate processing apparatus
US-2025062125-A1 · Feb 20, 2025 · US
Apparatus for treating substrate
US-12228861-B2 · Feb 18, 2025 · US
Substrate treating apparatus and substrate treating method
US-2024385524-A1 · Nov 21, 2024 · US
Substrate treating apparatus with exhaust airflow guide
US-12140868-B2 · Nov 12, 2024 · US
Apparatus for treating a substrate and method for improving cooling efficiency thereof
US-2024231246-A9 · Jul 11, 2024 · US
Substrate treating apparatus
US-2024222165-A1 · Jul 4, 2024 · US
Recent patents
Latest publications not already listed above.
Substrate processing apparatus and method
US-2024213059-A1 · Jun 27, 2024 · US
Apparatus for treating a substrate and method for improving cooling efficiency thereof
US-2024134292-A1 · Apr 25, 2024 · US
Cooling module for baking device and substrate treating apparatus including the same
US-2023408200-A1 · Dec 21, 2023 · US
Apparatus for treating substrate
US-2023408925-A1 · Dec 21, 2023 · US
Support unit and substrate treating apparatus including the same
US-2023014205-A1 · Jan 19, 2023 · US
Apparatus for processing substrate
US-2022205090-A1 · Jun 30, 2022 · US
Apparatus for treating substrate
US-2022163891-A1 · May 26, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semes Co Ltd | 17 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0402 | 8 |
| H10P72/0448 | 7 |
| G03F7/162 | 6 |
| H10P72/0434 | 5 |
| G03F7/168 | 5 |