Selective deposition of aluminum and nitrogen containing material
US-10903113-B2 · Jan 26, 2021 · US
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Patent family 58777101
This patent family groups 6 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 58777101 |
| Family type | — |
| Earliest priority | Aug 5, 2015 |
| First filing country | US |
| Member publications | 6 |
| Countries | US |
| Representative publication | US10903113B2 — Selective deposition of aluminum and nitrogen containing material |
Representative publication
Best representative member for this family based on priority and filing country.
US10903113B2 — Selective deposition of aluminum and nitrogen containing material (published Jan 26, 2021)
Member publications
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Selective deposition of aluminum and nitrogen containing material
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US-2017154806-A1 · Jun 1, 2017 · US